Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621400 | Transparent substrate, flexible display substrate and its manufacturing method, and display device | Yuehua Cui | 2023-04-04 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2023-02-28 |
| 11562902 | Hydrogen management in plasma deposited films | Diwakar Kedlaya, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more | 2023-01-24 |
| 11532525 | Controlling concentration profiles for deposited films using machine learning | Anton Baryshnikov, Aykut Aydin, Zubin Huang, Yi Yang, Diwakar Kedlaya +3 more | 2022-12-20 |
| 11527408 | Multiple spacer patterning schemes | Tzu-shun Yang, Karthik Janakiraman, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-12-13 |
| 11515170 | 3D NAND etch | Shishi Jiang, Pramit Manna, Bo Qi, Abhijit Basu Mallick, Tomohiko Kitajima +2 more | 2022-11-29 |
| 11488856 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2022-11-01 |
| 11462630 | Conformal halogen doping in 3D structures using conformal dopant film deposition | Yi Yang, Karthik Janakiraman, Abhijit Basu Mallick | 2022-10-04 |
| 11456173 | Methods for modifying photoresist profiles and tuning critical dimensions | Meenakshi GUPTA, Srinivas Guggilla, Karthik Janakiraman, Diwakar Kedlaya, Zubin Huang | 2022-09-27 |
| 11443919 | Film formation via pulsed RF plasma | Krishna Nittala, Diwakar Kedlaya, Karthik Janakiraman, Yi Yang | 2022-09-13 |
| 11361991 | Method for Si gap fill by PECVD | Xin Liu, Fei Wang, Abhijit Basu Mallick, Robert Jan Visser | 2022-06-14 |
| 11335555 | Methods for conformal doping of three dimensional structures | Yi Yang, Karthik Janakiraman | 2022-05-17 |
| 11328928 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Susmit Singha Roy, Gaurav Thareja +2 more | 2022-05-10 |
| 11315787 | Multiple spacer patterning schemes | Tzu-shun Yang, Karthik Janakiraman, Zubin Huang, Diwakar Kedlaya, Meenakshi GUPTA +5 more | 2022-04-26 |
| 11244824 | Conformal doped amorphous silicon as nucleation layer for metal deposition | Yihong Chen, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2022-02-08 |
| 11236418 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Abhijit Basu Mallick, Pramit Manna | 2022-02-01 |
| 11170990 | Polysilicon liners | Krishna Nittala, Karthik Janakiraman, Praket P. Jha, Jinrui GUO, Jingmei Liang | 2021-11-09 |
| 11145509 | Method for forming and patterning a layer and/or substrate | Takehito Koshizawa, Tejinder Singh, Hidetaka Oshio | 2021-10-12 |
| 11081348 | Selective deposition of silicon using deposition-treat-etch process | Fei Wang, Abhijit Basu Mallick, Robert Jan Visser | 2021-08-03 |
| 11004689 | Thermal silicon etch | Zihui Li, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2021-05-11 |
| 10886140 | 3D NAND etch | Shishi Jiang, Pramit Manna, Bo Qi, Abhijit Basu Mallick, Tomohiko Kitajima +2 more | 2021-01-05 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Ziqing Duan, Shishi Jiang | 2020-09-22 |
| 10699903 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Abhijit Basu Mallick | 2020-06-30 |
| 10636669 | Seam healing using high pressure anneal | Yihong Chen, Pramit Manna, Abhijit Basu Mallick, Shishi Jiang, Yong Wu +2 more | 2020-04-28 |