Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211694 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2025-01-28 |
| 11728168 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2023-08-15 |
| 11488856 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more | 2022-11-01 |
| 11094544 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2021-08-17 |
| 11011371 | SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material | Milind Gadre, Shaunak Mukherjee, Praket P. Jha, Deenesh Padhi, Abhijit Basu Mallick | 2021-05-18 |
| 10971364 | Ultra-high modulus and etch selectivity boron carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2021-04-06 |
| 10930475 | Graded in-situ charge trapping layers to enable electrostatic chucking and excellent particle performance for boron-doped carbon films | Prashant Kumar Kulshreshtha, Abdul Aziz Khaja, Zheng John Ye, Amit Kumar BANSAL | 2021-02-23 |
| 10930503 | Geometric control of bottom-up pillars for patterning applications | Abhijit Basu Mallick | 2021-02-23 |
| 10886172 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2021-01-05 |
| 10854511 | Methods of lowering wordline resistance | Yihong Chen, Yong Wu, Chia Cheng Chin, Xinliang Lu, Srinivas Gandikota +1 more | 2020-12-01 |
| 10840186 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Abhijit Basu Mallick, Praburam Gopalraja | 2020-11-17 |
| 10811303 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Abhijit Basu Mallick +1 more | 2020-10-20 |
| 10784107 | Methods of forming tungsten pillars | Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Rui Cheng, Shishi Jiang | 2020-09-22 |
| 10770349 | Critical dimension control for self-aligned contact patterning | Abhijit Basu Mallick | 2020-09-08 |
| 10699952 | Deposition and treatment of films for patterning | Atashi Basu, Abhijit Basu Mallick, Srinivas Gandikota | 2020-06-30 |
| 10636659 | Selective deposition for simplified process flow of pillar formation | Yihong Chen, Yong Wu, Abhijit Basu Mallick, Srinivas Gandikota | 2020-04-28 |
| 10622251 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2020-04-14 |
| 10559497 | Seamless tungsten fill by tungsten oxidation-reduction | Yong Wu, Yihong Chen, Shishi Jiang, Abhijit Basu Mallick, Srinivas Gandikota | 2020-02-11 |
| 10490411 | Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures | Kurtis Leschkies, Steven Verhaverbeke, Abhijit Basu Mallick | 2019-11-26 |
| 10418243 | Ultra-high modulus and etch selectivity boron-carbon hardmask films | Prashant Kumar Kulshreshtha, Karthik Thimmavajjula Narasimha, Kwangduk Douglas Lee, Bok Hoen Kim | 2019-09-17 |
| 10410865 | Methods of forming self-aligned vias | David Thompson, Benjamin Schmiege, Jeffrey W. Anthis, Abhijit Basu Mallick, Susmit Singha Roy +3 more | 2019-09-10 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Rui Cheng, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi | 2019-09-10 |
| 10403542 | Methods of forming self-aligned vias and air gaps | Susmit Singha Roy, Abhijit Basu Mallick, Praburam Gopalraja | 2019-09-03 |
| 10373822 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2019-08-06 |
| 10354916 | Methods for wordline separation in 3D-NAND devices | Yihong Chen, Abhijit Basu Mallick, Kelvin Chan | 2019-07-16 |