| 12054827 |
Flowable film curing using H2 plasma |
Pramit Manna, Abhijit Basu Mallick, Suresh Chand Seth, Srinivas D. Nemani |
2024-08-06 |
| 11615966 |
Flowable film formation and treatments |
Praket P. Jha, Abhijit Basu Mallick |
2023-03-28 |
| 11578409 |
Low deposition rates for flowable PECVD |
Pramit Manna, Abhijit Basu Mallick |
2023-02-14 |
| 11515170 |
3D NAND etch |
Pramit Manna, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2022-11-29 |
| 11227797 |
Film deposition using enhanced diffusion process |
Kurtis Leschkies, Pramit Manna, Abhijit Basu Mallick |
2022-01-18 |
| 11177128 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer |
Pramit Manna, Abhijit Basu Mallick, Kurtis Leschkies, Steven Verhaverbeke |
2021-11-16 |
| 11011384 |
Gapfill using reactive anneal |
Abhijit Basu Mallick, Pramit Manna |
2021-05-18 |
| 10886140 |
3D NAND etch |
Pramit Manna, Bo Qi, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2021-01-05 |
| 10818490 |
Controlled growth of thin silicon oxide film at low temperature |
Kurtis Leschkies, Pramit Manna, Abhijit Basu Mallick, Steven Verhaverbeke |
2020-10-27 |
| 10784107 |
Methods of forming tungsten pillars |
Abhijit Basu Mallick, Pramit Manna, Yihong Chen, Ziqing Duan, Rui Cheng |
2020-09-22 |
| 10714339 |
Selectively deposited parylene masks and methods related thereto |
Fei Wang, Miaojun Wang, Pramit Manna, Abhijit Basu Mallick, Robert Jan Visser |
2020-07-14 |
| 10699903 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film |
Pramit Manna, Rui Cheng, Abhijit Basu Mallick |
2020-06-30 |
| 10643841 |
Surface modification to improve amorphous silicon gapfill |
Pramit Manna, Abhijit Basu Mallick |
2020-05-05 |
| 10636669 |
Seam healing using high pressure anneal |
Yihong Chen, Rui Cheng, Pramit Manna, Abhijit Basu Mallick, Yong Wu +2 more |
2020-04-28 |
| 10580642 |
Two-step process for silicon gapfill |
Abhijit Basu Mallick, Pramit Manna |
2020-03-03 |
| 10559497 |
Seamless tungsten fill by tungsten oxidation-reduction |
Yong Wu, Yihong Chen, Ziqing Duan, Abhijit Basu Mallick, Srinivas Gandikota |
2020-02-11 |
| 10529585 |
Dry stripping of boron carbide hardmask |
Pramit Manna, Abhijit Basu Mallick, Kurtis Leschkies |
2020-01-07 |
| 10483102 |
Surface modification to improve amorphous silicon gapfill |
Pramit Manna, Abhijit Basu Mallick |
2019-11-19 |
| 10460933 |
Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film |
Pramit Manna, Rui Cheng, Abhijit Basu Mallick |
2019-10-29 |
| 10074814 |
Germanane analogs and optoelectronic devices using the same |
Joshua Goldberger, Elisabeth Bianco |
2018-09-11 |
