| 12482646 |
Processes for depositing SiB films |
Aykut Aydin, Rui Cheng, Karthik Janakiraman, Abhijit Basu Mallick, Takehito Koshizawa |
2025-11-25 |
|
| 12198936 |
Defect free germanium oxide gap fill |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick |
2025-01-14 |
|
| 12033848 |
Processes for depositing sib films |
Aykut Aydin, Rui Cheng, Karthik Janakiraman, Abhijit Basu Mallick, Takehito Koshizawa |
2024-07-09 |
$62,454,000 |
| 12027374 |
Processes to deposit amorphous-silicon etch protection liner |
Zeqing Shen, Abhijit Basu Mallick |
2024-07-02 |
$85,126,000 |
| 12018364 |
Super-conformal germanium oxide films |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick |
2024-06-25 |
$57,214,000 |
| 11859278 |
Molecular layer deposition of amorphous carbon films |
Bhaskar Jyoti Bhuyan, Mark Saly, Ahbijit Basu Mallick, Eugene Yu Jin Kong |
2024-01-02 |
$40,045,000 |
| 11830729 |
Low-k boron carbonitride films |
Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle |
2023-11-28 |
$39,424,000 |
| 11791155 |
Diffusion barriers for germanium |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick, Nitin K. Ingle |
2023-10-17 |
$42,568,000 |
| 11791068 |
Post insulator and direct current power transmission device |
Licheng LU, Faqiang Yan, Zhiyi Chong, Chengrong Li, Zhijun Guo +2 more |
2023-10-17 |
|
| 11781218 |
Defect free germanium oxide gap fill |
Huiyuan Wang, Susmit Singha Roy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-10-10 |
$39,034,000 |
| 11732352 |
Hydrogen free silicon dioxide |
Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle |
2023-08-22 |
$40,609,000 |
| 11702751 |
Non-conformal high selectivity film for etch critical dimension control |
Huiyuan Wang, Yingli Rao, Abhijit Basu Mallick |
2023-07-18 |
$58,990,000 |
| 11682554 |
Catalytic thermal deposition of carbon-containing materials |
Zeqing Shen, Abhijit Basu Mallick |
2023-06-20 |
$48,645,000 |
| 11676813 |
Doping semiconductor films |
Aykut Aydin, Rui Cheng, Yi Yang, Krishna Nittala, Karthik Janakiraman +1 more |
2023-06-13 |
$42,513,000 |
| 11658026 |
Conformal silicon oxide film deposition |
Zeqing Shen, Abhijit Basu Mallick |
2023-05-23 |
$53,064,000 |
| 11655537 |
HDP sacrificial carbon gapfill |
Zeqing Shen, Abhijit Basu Mallick |
2023-05-23 |
$53,064,000 |
| 11626278 |
Catalytic formation of boron and carbon films |
Zeqing Shen, Abhijit Basu Mallick |
2023-04-11 |
$32,726,000 |
| 11545354 |
Molecular layer deposition method and system |
Bhaskar Jyoti Bhuyan, Zeqing Shen, Abhijit Basu Mallick, Xinke Wang, Mark Saly |
2023-01-03 |
$39,123,000 |
| 11515170 |
3D NAND etch |
Shishi Jiang, Pramit Manna, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2022-11-29 |
$23,914,000 |
| 11495454 |
Deposition of low-stress boron-containing layers |
Huiyuan Wang, Rick Kustra, Abhijit Basu Mallick, Kaushik Alayavalli, Jay D. Pinson, II |
2022-11-08 |
$47,551,000 |
| 11404263 |
Deposition of low-stress carbon-containing layers |
Huiyuan Wang, Rick Kustra, Abhijit Basu Mallick, Kaushik Alayavalli, Jay D. Pinson, II |
2022-08-02 |
$46,822,000 |
| 11355354 |
Thermal deposition of doped silicon oxide |
Zeqing Shen, Abhijit Basu Mallick, Nitin K. Ingle |
2022-06-07 |
$46,649,000 |
| 11281441 |
Method and apparatus for compiling source code object, and computer |
Brice Adam Dobry, Haichuan Wang, Shiqiang Cui |
2022-03-22 |
|
| 11276573 |
Methods of forming high boron-content hard mask materials |
Zeqing Shen, Abhijit Basu Mallick |
2022-03-15 |
$44,583,000 |
| 10886140 |
3D NAND etch |
Shishi Jiang, Pramit Manna, Abhijit Basu Mallick, Rui Cheng, Tomohiko Kitajima +2 more |
2021-01-05 |
$38,335,000 |
