Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala, Pramit Manna +2 more | 2024-10-01 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala, Pramit Manna +2 more | 2023-08-08 |
| 11495454 | Deposition of low-stress boron-containing layers | Huiyuan Wang, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli, Jay D. Pinson, II | 2022-11-08 |
| 11404263 | Deposition of low-stress carbon-containing layers | Huiyuan Wang, Bo Qi, Abhijit Basu Mallick, Kaushik Alayavalli, Jay D. Pinson, II | 2022-08-02 |