Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142468 | Stress treatments for cover wafers | Bhaskar Kumar, Meng Cai, Sowjanya Musunuru, Kaushik Alayavalli, Andrew Nguyen | 2024-11-12 |
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Bhaskar Kumar, Krishna Nittala, Pramit Manna +2 more | 2024-10-01 |
| 11996273 | Methods of seasoning process chambers | Bhaskar Kumar, Anup K. Singh | 2024-05-28 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Bhaskar Kumar, Krishna Nittala, Pramit Manna +2 more | 2023-08-08 |
| 11069514 | Remote capacitively coupled plasma source with improved ion blocker | Vivek Shah, Bhaskar Kumar, Ganesh Balasubramanian | 2021-07-20 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2020-02-04 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2019-02-05 |
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2018-07-03 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2017-04-04 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2017-02-28 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2017-02-28 |