Issued Patents All Time
Showing 25 most recent of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12073264 | Decomposition of resource discovery roles, parts, and transport modeslc | Simon Heimler, Steffen Goebel | 2024-08-27 |
| 11493841 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Majeed A. Foad, Cara Beasley | 2022-11-08 |
| 10788744 | Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor | Cara Beasley, Majeed A. Foad | 2020-09-29 |
| 10551731 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Majeed A. Foad, Cara Beasley | 2020-02-04 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2020-02-04 |
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2019-12-31 |
| 10236198 | Methods for the continuous processing of substrates | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more | 2019-03-19 |
| 10209613 | System and method for manufacturing planarized extreme ultraviolet lithography blank | Cara Beasley, Majeed A. Foad, Timothy Michaelson | 2019-02-19 |
| 10199660 | Shadow mask alignment and management system | Byung Sung Kwak, Stefan Bangert, Michael Koenig | 2019-02-05 |
| 10197907 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2019-02-05 |
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad | 2018-07-03 |
| 9905418 | Growing graphene on substrates | Cara Beasley, Majeed A. Foad | 2018-02-27 |
| 9870935 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2018-01-16 |
| 9748125 | Continuous substrate processing system | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more | 2017-08-29 |
| 9739913 | Extreme ultraviolet capping layer and method of manufacturing and lithography thereof | Cara Beasley, Majeed A. Foad, Rudy Beckstrom, III | 2017-08-22 |
| 9690016 | Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof | Cara Beasley, Vinayak Vishwanath Hassan, Majeed A. Foad | 2017-06-27 |
| 9612522 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2017-04-04 |
| 9612521 | Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Kevin Moraes | 2017-04-04 |
| 9595436 | Growing graphene on substrates | Cara Beasley, Majeed A. Foad | 2017-03-14 |
| 9581890 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad | 2017-02-28 |
| 9581889 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley | 2017-02-28 |
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Soumendra N. Barman, Cara Beasley, Abhijit Basu Mallick, Nitin K. Ingle | 2016-08-16 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Cara Beasley, Majeed A. Foad, Timothy Michaelson | 2016-05-31 |
| 9343347 | Portable electrostatic chuck carrier for thin substrates | Dieter Haas, Majeed A. Foad | 2016-05-17 |