| 12073264 |
Decomposition of resource discovery roles, parts, and transport modeslc |
Simon Heimler, Steffen Goebel |
2024-08-27 |
$3,889,000 |
| 11493841 |
Glass ceramic for ultraviolet lithography and method of manufacturing thereof |
Majeed A. Foad, Cara Beasley |
2022-11-08 |
$47,551,000 |
| 10788744 |
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor |
Cara Beasley, Majeed A. Foad |
2020-09-29 |
$24,138,000 |
| 10551731 |
Glass ceramic for ultraviolet lithography and method of manufacturing thereof |
Majeed A. Foad, Cara Beasley |
2020-02-04 |
$27,329,000 |
| 10551732 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2020-02-04 |
$27,329,000 |
| 10522375 |
Monitoring system for deposition and method of operation thereof |
Edward W. Budiarto, Majeed A. Foad, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani |
2019-12-31 |
$41,069,000 |
| 10236198 |
Methods for the continuous processing of substrates |
Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more |
2019-03-19 |
$17,059,000 |
| 10209613 |
System and method for manufacturing planarized extreme ultraviolet lithography blank |
Cara Beasley, Majeed A. Foad, Timothy Michaelson |
2019-02-19 |
$29,015,000 |
| 10199660 |
Shadow mask alignment and management system |
Byung Sung Kwak, Stefan Bangert, Michael Koenig |
2019-02-05 |
$20,569,000 |
| 10197907 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2019-02-05 |
$20,569,000 |
| 10012897 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2018-07-03 |
$29,604,000 |
| 10012908 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof |
Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad |
2018-07-03 |
$29,604,000 |
| 9905418 |
Growing graphene on substrates |
Cara Beasley, Majeed A. Foad |
2018-02-27 |
$32,297,000 |
| 9870935 |
Monitoring system for deposition and method of operation thereof |
Edward W. Budiarto, Majeed A. Foad, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani |
2018-01-16 |
$25,242,000 |
| 9748125 |
Continuous substrate processing system |
Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Pravin K. Narwankar, Jeonghoon Oh +2 more |
2017-08-29 |
$19,098,000 |
| 9739913 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof |
Cara Beasley, Majeed A. Foad, Rudy Beckstrom, III |
2017-08-22 |
$17,010,000 |
| 9690016 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof |
Cara Beasley, Vinayak Vishwanath Hassan, Majeed A. Foad |
2017-06-27 |
$23,322,000 |
| 9612522 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2017-04-04 |
$16,159,000 |
| 9612521 |
Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor |
Kevin Moraes |
2017-04-04 |
$16,159,000 |
| 9595436 |
Growing graphene on substrates |
Cara Beasley, Majeed A. Foad |
2017-03-14 |
$16,778,000 |
| 9581890 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof |
Vinayak Vishwanath Hassan, Cara Beasley, Majeed A. Foad |
2017-02-28 |
$9,499,000 |
| 9581889 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor |
Vinayak Vishwanath Hassan, Majeed A. Foad, Cara Beasley |
2017-02-28 |
$9,499,000 |
| 9417515 |
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor |
Soumendra N. Barman, Cara Beasley, Abhijit Basu Mallick, Nitin K. Ingle |
2016-08-16 |
$20,837,000 |
| 9354508 |
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor |
Cara Beasley, Majeed A. Foad, Timothy Michaelson |
2016-05-31 |
$8,928,000 |
| 9343347 |
Portable electrostatic chuck carrier for thin substrates |
Dieter Haas, Majeed A. Foad |
2016-05-17 |
$7,135,000 |
