Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176205 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Shane Lavan | 2024-12-24 |
| 12142478 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Shane Lavan | 2024-11-12 |
| 11637004 | Alignment module with a cleaning chamber | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore +1 more | 2023-04-25 |
| 11631813 | Deposition mask and methods of manufacturing and using a deposition mask | Alexander Lerner | 2023-04-18 |
| 11538706 | System and method for aligning a mask with a substrate | Alexander Lerner, Michael P. Karazim, Andrew J. Constant, Jeffrey A. Brodine, Kim Vellore +1 more | 2022-12-27 |
| 11469096 | Method and chamber for backside physical vapor deposition | Chunming Zhou, Jothilingam Ramalingam, Yong Cao, Shane Lavan | 2022-10-11 |
| 11414740 | Processing system for forming layers | Alexander Lerner, Roey Shaviv, Michael P. Karazim, Steven V. Sansoni, Andrew J. Constant +4 more | 2022-08-16 |
| 11047039 | Substrate carrier having hard mask | Alexander Lerner, Kim Vellore, Ami Sade, Steven V. Sansoni, Andrew J. Constant +4 more | 2021-06-29 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Srinivas Guggilla, He Ren, Mehul Naik, David Thompson +6 more | 2020-07-07 |
| 10109520 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Sree Rangasai V. Kesapragada, Srinivas Guggilla, He Ren, Mehul Naik, David Thompson +6 more | 2018-10-23 |
| 9660185 | Pattern fortification for HDD bit patterned media pattern transfer | Roman Gouk, Steven Verhaverbeke, Alexander C. Kontos, Adolph Miller Allen | 2017-05-23 |
| 9612521 | Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Ralf Hofmann | 2017-04-04 |
| 9343664 | Pattern fortification for HDD bit patterned media pattern transfer | Roman Gouk, Steven Verhaverbeke, Alexander C. Kontos, Adolph Miller Allen | 2016-05-17 |
| 8895450 | Low resistivity tungsten PVD with enhanced ionization and RF power coupling | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2014-11-25 |
| 8637390 | Metal gate structures and methods for forming thereof | Seshadri Ganguli, Sang Ho Yu, Sang-Hyeob Lee, Hyoung-Chan Ha, Wei Ti Lee +4 more | 2014-01-28 |
| 8558299 | Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming | Yong Cao, Xianmin Tang, Srinivas Gandikota, Wei Wang, Zhendong Liu +3 more | 2013-10-15 |