Issued Patents All Time
Showing 25 most recent of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431358 | Methods and materials for enhanced barrier performance and reduced via resistance | Lu Chen, Seshadri Ganguli, Feng Chen | 2025-09-30 |
| 12351909 | Gap fill methods using catalyzed deposition | Byunghoon Yoon, Liqi Wu, Joung Joo Lee, Kai Wu, Xi Cen +2 more | 2025-07-08 |
| 12000044 | Catalyzed deposition of metal films | Seshadri Ganguli, Byunghoon Yoon, Wei-Min Chen | 2024-06-04 |
| 11959167 | Selective cobalt deposition on copper surfaces | Kevin Moraes, Seshadri Ganguli, Hua Chung, See-Eng Phan | 2024-04-16 |
| 11894233 | Electronic device having an oxygen free platinum group metal film | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2024-02-06 |
| 11680313 | Selective deposition on non-metallic surfaces | Lu Chen, Seshadri Ganguli | 2023-06-20 |
| 11621266 | Method of testing a gap fill for DRAM | Priyadarshi Panda, Seshadri Ganguli, Sung-Kwan Kang, Gill Yong Lee, Sanjay Natarajan +2 more | 2023-04-04 |
| 11552082 | Reducing gate induced drain leakage in DRAM wordline | Sung-Kwan Kang, Gill Yong Lee, Shih Chung Chen, Jeffrey W. Anthis | 2023-01-10 |
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2022-11-01 |
| 11421318 | Methods and apparatus for high reflectivity aluminum layers | Jacqueline S. Wrench, Liqi Wu, Hsiang-Ning Wu, Paul F. Ma, Fuqun Grace Vasiknanonte +1 more | 2022-08-23 |
| 11384429 | Selective cobalt deposition on copper surfaces | Kevin Moraes, Seshadri Ganguli, Hua Chung, See-Eng Phan | 2022-07-12 |
| 11286556 | Selective deposition of titanium films | Byunghoon Yoon, Wei-Sheng Lei | 2022-03-29 |
| 11282745 | Methods for filling features with ruthenium | Seshadri Ganguli | 2022-03-22 |
| 11171141 | Gap fill methods of forming buried word lines in DRAM without forming bottom voids | Priyadarshi Panda, Seshadri Ganguli, Sung-Kwan Kang, Gill Yong Lee, Sanjay Natarajan +2 more | 2021-11-09 |
| 11075276 | Methods and apparatus for n-type metal oxide semiconductor (NMOS) metal gate materials using atomic layer deposition (ALD) processes with metal based precursors | Yongjing Lin, Shih Chung Chen, Naomi Yoshida, Lin Dong, Liqi Wu +5 more | 2021-07-27 |
| 11060188 | Selective deposition of aluminum oxide on metal surfaces | Seshadri Ganguli | 2021-07-13 |
| 10930550 | Barrier for copper metallization and methods of forming | Seshadri Ganguli, Lu Chen | 2021-02-23 |
| 10790287 | Reducing gate induced drain leakage in DRAM wordline | Sung-Kwan Kang, Gill Yong Lee, Shih Chung Chen, Jeffrey W. Anthis | 2020-09-29 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more | 2020-06-30 |
| 10665542 | Cobalt manganese vapor phase deposition | Paul F. Ma, Jiang Lu, Ben-Li Sheu | 2020-05-26 |
| 10608097 | Low thickness dependent work-function nMOS integration for metal gate | Paul F. Ma, Seshadri Ganguli, Shih Chung Chen, Rajesh Sathiyanarayanan, Atashi Basu +3 more | 2020-03-31 |
| 10559578 | Deposition of cobalt films with high deposition rate | Jacqueline S. Wrench, Jing Zhou, Fuqun Grace Vasiknanonte, Jiang Lu, Paul F. Ma +3 more | 2020-02-11 |
| 10487398 | Synthesis of metal nitride thin films materials using hydrazine derivatives | Byunghoon Yoon, Seshadri Ganguli, Siddarth A. Krishnan, Paul F. Ma | 2019-11-26 |
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Kai Wu, Vikash Banthia, Mei Chang, Feiyue Ma | 2019-08-27 |
| 10358719 | Selective deposition of aluminum oxide on metal surfaces | Seshadri Ganguli | 2019-07-23 |