Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351909 | Gap fill methods using catalyzed deposition | Byunghoon Yoon, Liqi Wu, Joung Joo Lee, Xi Cen, Wei-Sheng Lei +2 more | 2025-07-08 |
| D1066440 | Process chamber pumping liner | Yang Li, Xi Cen, Min-Han Lee, Mehran Behdjat | 2025-03-11 |
| 12191198 | Low resistivity tungsten film and method of manufacture | Feihu Wang, Joung Joo Lee, Xi Cen, Zhibo Yuan, Wei-Sheng Lei +2 more | 2025-01-07 |
| 12159804 | Tungsten molybdenum structures | Xi Cen, Dixiong WANG, Yi Luo | 2024-12-03 |
| 12113020 | Formation of metal vias on metal lines | Ryan Smith, Nicolas L. Breil | 2024-10-08 |
| 12094773 | Methods for low resistivity and stress tungsten gap fill | Xi Cen, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2024-09-17 |
| 12037682 | Methods for forming low resistivity tungsten features | Peiqi WANG, Cheng-Liang Cheng, Insu HA, Sang Jin Lee | 2024-07-16 |
| 12014956 | Tungsten gapfill using molybdenum co-flow | Xi Cen | 2024-06-18 |
| 11859277 | Catalyst enhanced molybdenum deposition and gap fill | Xi Cen, Seshadri Ganguli, Xinming Zhang, Norman L. Tam, Abhilash J. Mayur | 2024-01-02 |
| 11798845 | Methods and apparatus for low resistivity and stress tungsten gap fill | Xi Cen, Min Heon, Wei Min Chan, Tom Ho Wing Yu, Peiqi WANG +4 more | 2023-10-24 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Avgerinos V. Gelatos, David T. Or +8 more | 2023-10-03 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Avgerinos V. Gelatos, David T. Or +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Yu Lei, Kazuya Daito, Yi Xu +13 more | 2022-06-07 |
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Vikash Banthia +4 more | 2020-12-29 |
| 10727119 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Mehul Naik, Zhiyuan Wu +2 more | 2020-07-28 |
| 10395916 | In-situ pre-clean for selectivity improvement for selective deposition | Vikash Banthia, Sang Ho Yu, Mei Chang, Feiyue Ma | 2019-08-27 |
| 10256144 | Process integration approach of selective tungsten via fill | He Ren, Feiyue Ma, Yu Lei, Mehul Naik, Zhiyuan Wu +2 more | 2019-04-09 |
| 9947578 | Methods for forming low-resistance contacts through integrated process flow systems | Yu Lei, Vikash Banthia, Xinyu Fu, Yi Xu, Kazuya Daito +9 more | 2018-04-17 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci +1 more | 2017-10-10 |
| 9748105 | Tungsten deposition with tungsten hexafluoride (WF6) etchback | Sang Ho Yu | 2017-08-29 |
| 9653352 | Methods for forming metal organic tungsten for middle of the line (MOL) applications | Liqi Wu, Sang Ho Yu, Kazuya Daito, Kie Jin Park, David Thompson | 2017-05-16 |
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 |
| 9169556 | Tungsten growth modulation by controlling surface composition | KieJin Park, Sang Ho Yu, Sang-Hyeob Lee, Kazuya Daito, Joshua Collins +1 more | 2015-10-27 |
| 9051655 | Boron ionization for aluminum oxide etch enhancement | Sang Ho Yu, Kie Jin Park, Glen T. Mori, Joshua Collins | 2015-06-09 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Amit Khandelwal, Benjamin C. Wang, Avgerinos V. Gelatos +3 more | 2014-12-30 |