Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249494 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, See-Eng Phan +3 more | 2025-03-11 |
| D1052548 | Gas diffuser | Devi Raghavee Veerappan, Peiyu Zhang, Borui Xia, Chih-Hsun Hsu | 2024-11-26 |
| 12016092 | Gas distribution ceramic heater for deposition chamber | Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Manjunatha Koppa, Ambarish Toorihal +2 more | 2024-06-18 |
| 11994305 | Ceiling cassette smart combined air conditioner | — | 2024-05-28 |
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Yuanhong Guo, Sheng Guo, Marek Radko, Steve Sansoni, See-Eng Phan +3 more | 2023-12-26 |
| 11628456 | Apparatus for increasing flux from an ampoule | Kenric Choi, Daping Yao, Mei Chang | 2023-04-18 |
| 11598003 | Substrate processing chamber having heated showerhead assembly | Faruk Gungor, Dien-Yeh Wu, Joel M. Huston, Mei Chang, Kazuya Daito +4 more | 2023-03-07 |
| 11555244 | High temperature dual chamber showerhead | Pingyan Lei, Dien-Yeh Wu, Jallepally Ravi, Takashi Kuratomi, Manjunatha Koppa +1 more | 2023-01-17 |
| 11421322 | Blocker plate for use in a substrate process chamber | Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2022-08-23 |
| 11059061 | Apparatus for increasing flux from an ampoule | Kenric Choi, Daping Yao, Mei Chang | 2021-07-13 |
| 10857655 | Substrate support plate with improved lift pin sealing | Olkan Cuvalci, Gwo-Chuan Tzu | 2020-12-08 |
| 10752990 | Apparatus and methods to remove residual precursor inside gas lines post-deposition | Daping Yao, Kenric Choi, Jiang Lu, Can Xu, Paul F. Ma +1 more | 2020-08-25 |
| 10593539 | Support assembly | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2020-03-17 |
| 10508339 | Blocker plate for use in a substrate process chamber | Yu Lei, Yi Xu, Kazuya Daito, Pingyan Lei, Dien-Yeh Wu +2 more | 2019-12-17 |
| 10407771 | Atomic layer deposition chamber with thermal lid | Anqing Cui, Faruk Gungor, Dien-Yeh Wu, Vikas Jangra, Muhammad M. Rasheed +6 more | 2019-09-10 |
| 9916994 | Substrate support with multi-piece sealing surface | Olkan Cuvalci, Gwo-Chuan Tzu | 2018-03-13 |
| 9905443 | Reflective deposition rings and substrate processing chambers incorporating same | Anantha K. Subramani, Joseph M. Ranish, Ashish Goel, Joung Joo Lee | 2018-02-27 |
| 9888528 | Substrate support with multiple heating zones | Tomoharu Matsushita, Jallepally Ravi, Cheng-Hsiung Tsai, Aravind Kamath, Manjunatha Koppa | 2018-02-06 |
| 9853579 | Rotatable heated electrostatic chuck | Anantha K. Subramani, Ashish Goel, Wei Wang, Bharath Swaminathan, Vijay D. Parkhe | 2017-12-26 |
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9490150 | Substrate support for substrate backside contamination control | Gwo-Chuan Tzu, Olkan Cuvalci, Yu Chang | 2016-11-08 |
| 9206512 | Gas distribution system | Hanh Nguyen, Majeed A. Foad, Dieter Haas, Karl J. Armstrong | 2015-12-08 |
| 9017776 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Hou Gong Wang +2 more | 2015-04-28 |
| 9004006 | Process chamber lid design with built-in plasma source for short lifetime species | Chien-Teh Kao, Hyman Lam, Mei Chang, David T. Or, Nicholas R. Denny | 2015-04-14 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Amit Khandelwal, Benjamin C. Wang, Avgerinos V. Gelatos, Kai Wu +3 more | 2014-12-30 |