Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749543 | Chamber matching and calibration | Xuesong Lu, Yu Lei, Anup Phatak, Chong Jiang, Malcolm Delaney +1 more | 2023-09-05 |
| RE48994 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2022-03-29 |
| 11133155 | Apparatus for depositing metal films with plasma treatment | Daping Yao, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2021-09-28 |
| 10640870 | Gas feedthrough assembly | Daping Yao, Jiang Lu, Dien-Yeh Wu, Can Xu, Paul F. Ma +1 more | 2020-05-05 |
| 10453657 | Apparatus for depositing metal films with plasma treatment | Daping Yao, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more | 2019-10-22 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2019-06-18 |
| 9982343 | Apparatus for providing plasma to a process chamber | Chien-Teh Kao | 2018-05-29 |
| 9447497 | Processing chamber gas delivery system with hot-swappable ampoule | Dien-Yeh Wu, Mark S. Johnson, David Santi | 2016-09-20 |
| 9252024 | Deposition chambers with UV treatment and methods of use | Nicholas R. Denny, Joseph AuBuchon, Mei Chang | 2016-02-02 |
| 9109754 | Apparatus and method for providing uniform flow of gas | Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more | 2015-08-18 |
| 9017776 | Apparatuses and methods for atomic layer deposition | Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hou Gong Wang +2 more | 2015-04-28 |
| 9004006 | Process chamber lid design with built-in plasma source for short lifetime species | Chien-Teh Kao, Mei Chang, David T. Or, Nicholas R. Denny, Xiaoxiong Yuan | 2015-04-14 |
| 8747556 | Apparatuses and methods for atomic layer deposition | Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hougong Wang +2 more | 2014-06-10 |
| 8291857 | Apparatuses and methods for atomic layer deposition | Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hou Gong Wang +2 more | 2012-10-23 |
| 8293015 | Apparatuses and methods for atomic layer deposition | Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hougong Wang +2 more | 2012-10-23 |