| 11749543 |
Chamber matching and calibration |
Xuesong Lu, Yu Lei, Anup Phatak, Chong Jiang, Malcolm Delaney +1 more |
2023-09-05 |
$42,922,000 |
| RE48994 |
Apparatus and method for providing uniform flow of gas |
Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more |
2022-03-29 |
|
| 11133155 |
Apparatus for depositing metal films with plasma treatment |
Daping Yao, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more |
2021-09-28 |
$64,178,000 |
| 10640870 |
Gas feedthrough assembly |
Daping Yao, Jiang Lu, Dien-Yeh Wu, Can Xu, Paul F. Ma +1 more |
2020-05-05 |
$58,379,000 |
| 10453657 |
Apparatus for depositing metal films with plasma treatment |
Daping Yao, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu +2 more |
2019-10-22 |
$16,291,000 |
| RE47440 |
Apparatus and method for providing uniform flow of gas |
Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more |
2019-06-18 |
|
| 9982343 |
Apparatus for providing plasma to a process chamber |
Chien-Teh Kao |
2018-05-29 |
$37,048,000 |
| 9447497 |
Processing chamber gas delivery system with hot-swappable ampoule |
Dien-Yeh Wu, Mark S. Johnson, David Santi |
2016-09-20 |
$12,933,000 |
| 9252024 |
Deposition chambers with UV treatment and methods of use |
Nicholas R. Denny, Joseph AuBuchon, Mei Chang |
2016-02-02 |
$8,701,000 |
| 9109754 |
Apparatus and method for providing uniform flow of gas |
Joseph Yudovsky, Mei Chang, Faruk Gungor, Paul F. Ma, David Chu +2 more |
2015-08-18 |
$12,475,000 |
| 9017776 |
Apparatuses and methods for atomic layer deposition |
Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hou Gong Wang +2 more |
2015-04-28 |
$17,425,000 |
| 9004006 |
Process chamber lid design with built-in plasma source for short lifetime species |
Chien-Teh Kao, Mei Chang, David T. Or, Nicholas R. Denny, Xiaoxiong Yuan |
2015-04-14 |
$19,339,000 |
| 8747556 |
Apparatuses and methods for atomic layer deposition |
Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hougong Wang +2 more |
2014-06-10 |
$12,688,000 |
| 8291857 |
Apparatuses and methods for atomic layer deposition |
Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hou Gong Wang +2 more |
2012-10-23 |
$4,153,000 |
| 8293015 |
Apparatuses and methods for atomic layer deposition |
Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan, Hougong Wang +2 more |
2012-10-23 |
$4,153,000 |
