Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9017776 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2015-04-28 |
| 8291857 | Apparatuses and methods for atomic layer deposition | Hyman Lam, Bo Zheng, Hua Ai, Michael S. Jackson, Xiaoxiong Yuan +2 more | 2012-10-23 |