Issued Patents All Time
Showing 25 most recent of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more | 2025-09-02 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi +3 more | 2025-08-19 |
| 12374568 | One chamber multi-station selective metal removal | Shiyu YUE, Sahil Patel, Wei Lei, Chih-Hsun Hsu, Yi Xu +7 more | 2025-07-29 |
| 12344539 | Plasmon-enhanced catalytic ozonation for recalcitrant water pollutant removal | Tingtang Wu, Wenwen Yang | 2025-07-01 |
| 12318537 | Respiratory apparatus with noise-damping member | Jiebing XU, Haibin Yu, Zhenxiang Hu | 2025-06-03 |
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2025-05-06 |
| 12280217 | Heater plate | Jiebing XU, Haibin Yu, Zhenxiang Hu, Jun Zhao | 2025-04-22 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO, Wei Lei +8 more | 2025-04-08 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2025-02-18 |
| 12191200 | Methods for minimizing feature-to-feature gap fill height variations | Jiajie Cen, Da He, Yi Xu | 2025-01-07 |
| 12100576 | Metal oxide preclean chamber with improved selectivity and flow conductance | Andrew Nguyen, Xue Yang Chang, Xianmin Tang, John C. Forster, Yogananda Sarode Vishwanath +2 more | 2024-09-24 |
| 11967525 | Selective tungsten deposition at low temperatures | Yi Xu, Yufei Hu, Kazuya Daito, Da He, Jiajie Cen | 2024-04-23 |
| 11958038 | Reductive boron nitride with extended reactive vacancies for catalytic applications | Mauricio Terrones, He Liu, Kazunori FUJISAWA, Ana Laura Elias Arriaga, Tianyi Zhang +4 more | 2024-04-16 |
| 11955381 | Low-temperature plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more | 2024-04-09 |
| 11955319 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more | 2024-04-09 |
| 11948836 | Deposition of metal films with tungsten liner | Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2024-04-02 |
| 11929691 | Triboelectric generator systems and methods for energy harvesting and sensing applications | Gang Wang, Moonhyung Jang, Jacob Lee | 2024-03-12 |
| 11774612 | Device for monitoring and identifying mountain torrent and debris flow and method for early warning of disasters | Chuanzheng Liu, Peng Cui, Qiang Zou | 2023-10-03 |
| 11776805 | Selective oxidation and simplified pre-clean | Bencherki Mebarki, Joung Joo Lee, Yi Xu, Xianmin Tang, Kelvin Chan +2 more | 2023-10-03 |
| 11776806 | Multi-step pre-clean for selective metal gap fill | Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more | 2023-10-03 |
| 11749543 | Chamber matching and calibration | Xuesong Lu, Anup Phatak, Hyman Lam, Chong Jiang, Malcolm Delaney +1 more | 2023-09-05 |
| 11739164 | Compositions and methods related to 2 dimensional molecular composites | Melik C. Demirel, Mert VURAL, Mauricio Terrones, Ibrahim T. Ozbolat | 2023-08-29 |
| 11721542 | Dual plasma pre-clean for selective gap fill | Yi Xu, Yufei Hu, Kazuya Daito, Dien-Yeh Wu, Jallepally Ravi | 2023-08-08 |
| 11713300 | Platelet aggregation inhibitor, preparation and uses thereof | Shaojie Wang, Bing Zhang | 2023-08-01 |