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Self field-suppression CVD tungsten (W) fill on PVD W liner |
Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more |
2025-09-02 |
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| 12394619 |
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL |
Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more |
2025-08-19 |
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| D1089130 |
Process chamber manifold |
Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi +3 more |
2025-08-19 |
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| 12374568 |
One chamber multi-station selective metal removal |
Shiyu YUE, Sahil Patel, Wei Lei, Chih-Hsun Hsu, Yi Xu +7 more |
2025-07-29 |
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| 12344539 |
Plasmon-enhanced catalytic ozonation for recalcitrant water pollutant removal |
Tingtang Wu, Wenwen Yang |
2025-07-01 |
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| 12318537 |
Respiratory apparatus with noise-damping member |
Jiebing XU, Haibin Yu, Zhenxiang Hu |
2025-06-03 |
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| 12293902 |
Process kit for a substrate support |
Muhannad Mustafa, Muhammad M. Rasheed, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more |
2025-05-06 |
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| 12280217 |
Heater plate |
Jiebing XU, Haibin Yu, Zhenxiang Hu, Jun Zhao |
2025-04-22 |
|
| 12272659 |
Methods for forming metal gapfill with low resistivity |
Yi Xu, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO, Wei Lei +8 more |
2025-04-08 |
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| 12230479 |
Processing chamber with multiple plasma units |
Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more |
2025-02-18 |
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| 12191200 |
Methods for minimizing feature-to-feature gap fill height variations |
Jiajie Cen, Da He, Yi Xu |
2025-01-07 |
|
| 12100576 |
Metal oxide preclean chamber with improved selectivity and flow conductance |
Andrew Nguyen, Xue Yang Chang, Xianmin Tang, John C. Forster, Yogananda Sarode Vishwanath +2 more |
2024-09-24 |
$100,019,000 |
| 11967525 |
Selective tungsten deposition at low temperatures |
Yi Xu, Yufei Hu, Kazuya Daito, Da He, Jiajie Cen |
2024-04-23 |
$64,043,000 |
| 11958038 |
Reductive boron nitride with extended reactive vacancies for catalytic applications |
Mauricio Terrones, He Liu, Kazunori FUJISAWA, Ana Laura Elias Arriaga, Tianyi Zhang +4 more |
2024-04-16 |
$521,000 |
| 11955381 |
Low-temperature plasma pre-clean for selective gap fill |
Yi Xu, Yufei Hu, Kazuya Daito, Geraldine VASQUEZ, Da He +2 more |
2024-04-09 |
$47,694,000 |
| 11955319 |
Processing chamber with multiple plasma units |
Kazuya Daito, Yi Xu, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more |
2024-04-09 |
$47,694,000 |
| 11948836 |
Deposition of metal films with tungsten liner |
Sang-Hyeob Lee, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more |
2024-04-02 |
$42,223,000 |
| 11929691 |
Triboelectric generator systems and methods for energy harvesting and sensing applications |
Gang Wang, Moonhyung Jang, Jacob Lee |
2024-03-12 |
|
| 11774612 |
Device for monitoring and identifying mountain torrent and debris flow and method for early warning of disasters |
Chuanzheng Liu, Peng Cui, Qiang Zou |
2023-10-03 |
|
| 11776805 |
Selective oxidation and simplified pre-clean |
Bencherki Mebarki, Joung Joo Lee, Yi Xu, Xianmin Tang, Kelvin Chan +2 more |
2023-10-03 |
$34,462,000 |
| 11776806 |
Multi-step pre-clean for selective metal gap fill |
Xi Cen, Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos +8 more |
2023-10-03 |
$34,462,000 |
| 11749543 |
Chamber matching and calibration |
Xuesong Lu, Anup Phatak, Hyman Lam, Chong Jiang, Malcolm Delaney +1 more |
2023-09-05 |
$42,922,000 |
| 11739164 |
Compositions and methods related to 2 dimensional molecular composites |
Melik C. Demirel, Mert VURAL, Mauricio Terrones, Ibrahim T. Ozbolat |
2023-08-29 |
$531,000 |
| 11721542 |
Dual plasma pre-clean for selective gap fill |
Yi Xu, Yufei Hu, Kazuya Daito, Dien-Yeh Wu, Jallepally Ravi |
2023-08-08 |
$46,911,000 |
| 11713300 |
Platelet aggregation inhibitor, preparation and uses thereof |
Shaojie Wang, Bing Zhang |
2023-08-01 |
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