Process kit for a substrate support

Assignee

• Applied Materials

Inventors

• Muhannad Mustafa (31 patents)
• Muhammad M. Rasheed (81 patents)
• Yu Lei (71 patents)
• Avgerinos V. Gelatos (71 patents)
• Vikash Banthia (20 patents)
• Victor H Calderon (2 patents)
• Shi Wei Toh (4 patents)
• Yung-Hsin Lee (4 patents)
• Anindita Sen (2 patents)

View full patent text on Google Patents →