Self field-suppression CVD tungsten (W) fill on PVD W liner

Assignee

• Applied Materials

Inventors

• Zhimin QI (5 patents)
• Yi Xu (62 patents)
• Shirish A. PETHE (12 patents)
• Xingyao GAO (4 patents)
• Shiyu YUE (4 patents)
• Aixi ZHANG (6 patents)
• Wei Lei (28 patents)
• Yu Lei (71 patents)
• Geraldine VASQUEZ (5 patents)
• Dien-Yeh Wu (62 patents)
• Da He (6 patents)

View full patent text on Google Patents →