Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293902 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia +3 more | 2025-05-06 |
| 11387134 | Process kit for a substrate support | Muhannad Mustafa, Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia +3 more | 2022-07-12 |
| 10256076 | Substrate processing apparatus and methods | Avgerinos V. Gelatos, Vikash Banthia | 2019-04-09 |
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Ping Han Hsieh, Teng-Fang Kuo, Avgerinos V. Gelatos | 2018-06-26 |