Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Zhenwen Ding | 2023-09-26 |
| 11476146 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Zhenwen Ding | 2022-10-18 |
| 11087979 | Cleaning method | Christopher S. Olsen, Peter Stone, Ping Han Hsieh, Manoj Vellaikal | 2021-08-10 |
| 10861693 | Cleaning method | Peter Stone, Christopher S. Olsen, Ping Han Hsieh, Zhenwen Ding | 2020-12-08 |
| 10679885 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Zhenwen Ding | 2020-06-09 |
| 10199221 | Cleaning method | Christopher S. Olsen, Peter Stone, Ping Han Hsieh, Manoj Vellaikal | 2019-02-05 |
| 10020218 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Zhenwen Ding | 2018-07-10 |
| 10008388 | Device conformity control by low temperature, low pressure, inductively coupled ammonia-nitrogen trifluoride plasma | Ping Han Hsieh, Shi Wei Toh, Avgerinos V. Gelatos | 2018-06-26 |
| 9870921 | Cleaning method | Christopher S. Olsen, Peter Stone, Ping Han Hsieh, Manoj Vellaikal | 2018-01-16 |
| 9805914 | Methods for removing contamination from surfaces in substrate processing systems | Chun YAN, Jim Zhongyi He, Xinyu BAO, Zhenwen Ding, Adam Lane | 2017-10-31 |
| 9240315 | CVD oxide surface pre-conditioning by inductively coupled O2 plasma | Ping Han Hsieh | 2016-01-19 |
| 7226643 | Thermal pyrolysising chemical vapor deposition method for synthesizing nano-carbon material | Zhen-Yu Juang, Chuen-Horng Tsai, I-Nan Lin | 2007-06-05 |