Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2023-09-26 |
| 11476146 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2022-10-18 |
| 11114327 | ESC substrate support with chucking force control | Wendell Glenn Boyd, Jr., Jim Zhongyi He | 2021-09-07 |
| 10861693 | Cleaning method | Peter Stone, Christopher S. Olsen, Teng-Fang Kuo, Ping Han Hsieh | 2020-12-08 |
| 10679885 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2020-06-09 |
| 10020218 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2018-07-10 |
| 9805914 | Methods for removing contamination from surfaces in substrate processing systems | Chun YAN, Jim Zhongyi He, Xinyu BAO, Teng-Fang Kuo, Adam Lane | 2017-10-31 |
| 8663563 | Reflective diffractometric hydrogel sensor for biological and chemical detection | Cagri A. Savran, Chun-Li Chang, Babak Ziaie, Andrew Ellington, Venkata Naga Lakshmi Rekha Patchigolla | 2014-03-04 |