Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424413 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2025-09-23 |
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Badri Narayan Ramamurthi, Shekhar ATHANI +2 more | 2025-06-03 |
| 12074052 | Forming mesas on an electrostatic chuck | Stanley Wu, Matthew Boyd | 2024-08-27 |
| 11915913 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2024-02-27 |
| 11854911 | Methods, systems, and apparatus for conducting chucking operations using an adjusted chucking voltage if a process shift occurs | Matthew Boyd | 2023-12-26 |
| 11769683 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2023-09-26 |
| 11699611 | Forming mesas on an electrostatic chuck | Stanley Wu, Matthew Boyd | 2023-07-11 |
| 11676802 | Substrate support with real time force and film stress control | Govinda Raj, Matthew J. Busche | 2023-06-13 |
| 11648639 | Polishing jig assembly for a new or refurbished electrostatic chuck | William M. Lu, Stacy Meyer | 2023-05-16 |
| 11476146 | Substrate support assembly with deposited surface features | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2022-10-18 |
| 11114327 | ESC substrate support with chucking force control | Jim Zhongyi He, Zhenwen Ding | 2021-09-07 |
| 11114326 | Substrate chucking and dechucking methods | Jim Zhongyi He, Ramesh Gopalan, Robert T. Hirahara, Govinda Raj | 2021-09-07 |
| 11054317 | Method and apparatus for direct measurement of chucking force on an electrostatic chuck | Charles G. Potter, Govinda Raj, Robert T. Hirahara | 2021-07-06 |
| 10847402 | Bond protection around porous plugs | Sumanth Banda | 2020-11-24 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Todd Egan, Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |
| 10679885 | Substrate support assembly with deposited surface features | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2020-06-09 |
| 10654147 | Polishing of electrostatic substrate support geometries | Jim Zhongyi He | 2020-05-19 |
| 10648788 | Substrate distance monitoring | Govinda Raj | 2020-05-12 |
| 10460916 | Real time monitoring with closed loop chucking force control | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2019-09-03 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 10020218 | Substrate support assembly with deposited surface features | Vijay D. Parkhe, Teng-Fang Kuo, Zhenwen Ding | 2018-07-10 |
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Dmitry A. Dzilno, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2018-05-29 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2018-01-23 |
| 9698041 | Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods | Matthew J. Busche, Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2017-07-04 |