Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach | 2017-01-31 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2016-12-13 |
| 9196514 | Electrostatic chuck with variable pixilated heating | Vijay D. Parkhe | 2015-11-24 |
| 9001489 | Electrostatic chuck AlN dielectric repair | Joseph F. Sommers, William M. Lu, Rajan Balesan | 2015-04-07 |