Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404584 | Parallel atomic layer deposition of target element interiors | Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Gayatri Natu, Mahesh Arcot +4 more | 2025-09-02 |
| 12322633 | Electrostatic chuck with improved temperature control | Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi, Shekhar ATHANI +2 more | 2025-06-03 |
| 12074010 | Atomic layer deposition part coating chamber | Michael R. Rice, Steven Marcus, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more | 2024-08-27 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Prashant A. DESAI, Diwakar Kedlaya, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more | 2023-03-07 |
| 10679827 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Gopu Krishna, Ravikumar Patil, Somil KAPADIA, Sonny Kunnakkat | 2020-06-09 |
| 10515843 | Amalgamated cover ring | Govinda Raj, Stanley Wu | 2019-12-24 |
| 10510567 | Integrated substrate temperature measurement on high temperature ceramic heater | Yizhen Zhang, Rupankar Choudhury, Jay D. Pinson, II, Jason M. Schaller | 2019-12-17 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Rupankar Choudhury +2 more | 2019-08-20 |