Atomic layer deposition coating system for inner walls of gas lines

Assignee

• Applied Materials

Inventors

• Hanish Kumar Panavalappil Kumarankutty (9 patents)
• Yogesh Tomar (2 patents)
• Nikshep Patil (4 patents)
• Hari Venkatesh Rajendran (2 patents)
• Kirubanandan Naina SHANMUGAM (3 patents)
• Gayatri Natu (7 patents)
• Mahesh Arcot (5 patents)
• Senthil Kumar Nattamai Subramanian (3 patents)
• Steven Marcus (31 patents)
• Michael R. Rice (217 patents)

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