| 12486571 |
Atomic layer deposition coating system for inner walls of gas lines |
Hanish Kumar Panavalappil Kumarankutty, Yogesh Tomar, Nikshep Patil, Hari Venkatesh Rajendran, Kirubanandan Naina SHANMUGAM +4 more |
2025-12-02 |
|
| 12431361 |
Self-aligned double patterning with spatial atomic layer deposition |
Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka |
2025-09-30 |
|
| 12305275 |
Corrosion resistant film on a chamber component and methods of depositing thereof |
Lisa J. Enman, Mark Saly, Lei Zhou |
2025-05-20 |
|
| 12074010 |
Atomic layer deposition part coating chamber |
Michael R. Rice, Hanish Kumar Panavalappil Kumarankutty, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more |
2024-08-27 |
$120,173,000 |
| 11946140 |
Hot showerhead |
Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa +5 more |
2024-04-02 |
$42,223,000 |
| 11932938 |
Corrosion resistant film on a chamber component and methods of depositing thereof |
Lisa J. Enman, Mark Saly, Lei Zhou |
2024-03-19 |
$54,086,000 |
| 11821083 |
Gas separation control in spatial atomic layer deposition |
Ning Li, Tai T. Ngo, Kevin Griffin |
2023-11-21 |
$39,416,000 |
| 11658014 |
Apparatuses and methods of protecting nickel and nickel containing components with thin films |
Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more |
2023-05-23 |
$53,064,000 |
| 11612291 |
Vacuum cleaner |
William Jacob Kozlowski, Jr. |
2023-03-28 |
|
| 11612292 |
Vacuum cleaner |
William Jacob Kozlowski, Jr. |
2023-03-28 |
|
| 11607637 |
Power tool including an air filter and debris collector |
Paul Fry, Thomas G. Simeone, Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman +12 more |
2023-03-21 |
|
| 11363922 |
Vacuum cleaner and filter for a vacuum cleaner |
Roderick Burgess, Robert Patrick Warren, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more |
2022-06-21 |
|
| 11230763 |
Gas separation control in spatial atomic layer deposition |
Ning Li, Tai T. Ngo, Kevin Griffin |
2022-01-25 |
$92,631,000 |
| 11164753 |
Self-aligned double patterning with spatial atomic layer deposition |
Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka |
2021-11-02 |
$95,673,000 |
| 11083354 |
Dirt collector for a vacuum cleaner |
Michael Bloom, William Jacob Kozlowski, Jr. |
2021-08-10 |
|
| 11058273 |
Vacuum cleaner |
William Jacob Kozlowski, Jr. |
2021-07-13 |
|
| 10743731 |
Vacuum filter |
Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more |
2020-08-18 |
|
| 10570511 |
Gas separation control in spatial atomic layer deposition |
Ning Li, Tai T. Ngo, Kevin Griffin |
2020-02-25 |
$22,337,000 |
| 10531772 |
Handheld vacuum cleaner |
Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more |
2020-01-14 |
|
| 10470625 |
Vacuum cleaner and filter for a vacuum cleaner |
Roderick Burgess, Robert Patrick Warren, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more |
2019-11-12 |
|
| 9631272 |
Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds |
Dong Li, Suvi Haukka, Wei Li |
2017-04-25 |
|
| 9466574 |
Plasma-enhanced atomic layer deposition of conductive material over dielectric layers |
Robert Brennan Milligan, Dong Li |
2016-10-11 |
|
| 8557702 |
Plasma-enhanced atomic layers deposition of conductive material over dielectric layers |
Robert Brennan Milligan, Doug Li |
2013-10-15 |
$11,311,000 |
| 8383525 |
Plasma-enhanced deposition process for forming a metal oxide thin film and related structures |
Petri Raisanen |
2013-02-26 |
$8,341,000 |
| 8334218 |
Method of forming non-conformal layers |
Sebastian E. Van Nooten, Jan Willem Maes, Glen Wilk, Petri Raisanen, Kai-Erik Elers |
2012-12-18 |
$14,943,000 |
