Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431361 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka | 2025-09-30 |
| 12305275 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Mark Saly, Lei Zhou | 2025-05-20 |
| 12074010 | Atomic layer deposition part coating chamber | Michael R. Rice, Hanish Kumar Panavalappil Kumarankutty, Kirubanandan Naina SHANMUGAM, Sriharsha DHARMAPURA SATHYANARAYANAMURTHY, Madhukar KRISHNA +3 more | 2024-08-27 |
| 11946140 | Hot showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Ramcharan Sundar, Arun Kumar Kotrappa +5 more | 2024-04-02 |
| 11932938 | Corrosion resistant film on a chamber component and methods of depositing thereof | Lisa J. Enman, Mark Saly, Lei Zhou | 2024-03-19 |
| 11821083 | Gas separation control in spatial atomic layer deposition | Ning Li, Tai T. Ngo, Kevin Griffin | 2023-11-21 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Jennifer Y. Sun, Lei Zhou +3 more | 2023-05-23 |
| 11612292 | Vacuum cleaner | William Jacob Kozlowski, Jr. | 2023-03-28 |
| 11612291 | Vacuum cleaner | William Jacob Kozlowski, Jr. | 2023-03-28 |
| 11607637 | Power tool including an air filter and debris collector | Paul Fry, Thomas G. Simeone, Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman +12 more | 2023-03-21 |
| 11363922 | Vacuum cleaner and filter for a vacuum cleaner | Roderick Burgess, Robert Patrick Warren, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more | 2022-06-21 |
| 11230763 | Gas separation control in spatial atomic layer deposition | Ning Li, Tai T. Ngo, Kevin Griffin | 2022-01-25 |
| 11164753 | Self-aligned double patterning with spatial atomic layer deposition | Ning Li, Victor Nguyen, Mihaela Balseanu, Li-Qun Xia, Keiichi Tanaka | 2021-11-02 |
| 11083354 | Dirt collector for a vacuum cleaner | Michael Bloom, William Jacob Kozlowski, Jr. | 2021-08-10 |
| 11058273 | Vacuum cleaner | William Jacob Kozlowski, Jr. | 2021-07-13 |
| 10743731 | Vacuum filter | Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more | 2020-08-18 |
| 10570511 | Gas separation control in spatial atomic layer deposition | Ning Li, Tai T. Ngo, Kevin Griffin | 2020-02-25 |
| 10531772 | Handheld vacuum cleaner | Robert Patrick Warren, Roderick Burgess, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more | 2020-01-14 |
| 10470625 | Vacuum cleaner and filter for a vacuum cleaner | Roderick Burgess, Robert Patrick Warren, Joseph M. Lehman, Garry Fee, Michael Bloom +1 more | 2019-11-12 |
| 9631272 | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds | Dong Li, Suvi Haukka, Wei Li | 2017-04-25 |
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Robert Brennan Milligan, Dong Li | 2016-10-11 |
| 8557702 | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers | Robert Brennan Milligan, Doug Li | 2013-10-15 |
| 8383525 | Plasma-enhanced deposition process for forming a metal oxide thin film and related structures | Petri Raisanen | 2013-02-26 |
| 8334218 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Glen Wilk, Petri Raisanen, Kai-Erik Elers | 2012-12-18 |
| 8268409 | Plasma-enhanced deposition of metal carbide films | Kai-Erik Elers, Glen Wilk | 2012-09-18 |