Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354877 | Vapor deposition of films comprising molybdenum | Bhushan Zope, Eric Christopher Stevens, Shankar Swaminathan, Eric James Shero | 2025-07-08 |
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, William George Petro, Eric Wang, Fred Alokozai, Dong Li +3 more | 2024-05-07 |
| 11306395 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Eric James Shero, William George Petro, Eric Wang, Fred Alokozai, Dong Li +3 more | 2022-04-19 |
| 11233133 | NbMC layers | Chiyu Zhu, Timo Asikainen | 2022-01-25 |
| 10865475 | Deposition of metal borides and silicides | Petri Raisanen, Eric James Shero, Suvi Haukka, Michael Eugene Givens | 2020-12-15 |
| 10211308 | NbMC layers | Chiyu Zhu, Timo Asikainen | 2019-02-19 |
| 10087522 | Deposition of metal borides | Petri Raisanen, Eric James Shero, Suvi Haukka, Michael Eugene Givens | 2018-10-02 |
| 10083836 | Formation of boron-doped titanium metal films with high work function | — | 2018-09-25 |
| 10023960 | Process gas management for an inductively-coupled plasma deposition reactor | Fred Alokozai | 2018-07-17 |
| 9605342 | Process gas management for an inductively-coupled plasma deposition reactor | Fred Alokozai | 2017-03-28 |
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Dong Li, Steven Marcus | 2016-10-11 |
| 9412564 | Semiconductor reaction chamber with plasma capabilities | Fred Alokozai | 2016-08-09 |
| 9029253 | Phase-stabilized thin films, structures and devices including the thin films, and methods of forming same | Fred Alokozai | 2015-05-12 |
| 9021985 | Process gas management for an inductively-coupled plasma deposition reactor | Fred Alokozai | 2015-05-05 |
| 9018111 | Semiconductor reaction chamber with plasma capabilities | Fred Alokozai | 2015-04-28 |
| D698904 | Vacuum flange ring | Michael Halpin | 2014-02-04 |
| 8557702 | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers | Doug Li, Steven Marcus | 2013-10-15 |
| 7713874 | Periodic plasma annealing in an ALD-type process | — | 2010-05-11 |