Issued Patents All Time
Showing 25 most recent of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416081 | Manifolds for uniform vapor deposition | David Marquardt, Andrew Michael Yednak, III, Herbert Terhorst | 2025-09-16 |
| 12406881 | Methods and systems for filling a gap | Elina Färm, Shinya Iwashita, Charles Dezelah, Jan Willem Maes, Timothee Blanquart +5 more | 2025-09-02 |
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Bhushan Zope | 2025-09-02 |
| 12362171 | Methods and systems for forming a layer comprising aluminum, titanium, and carbon | Lifu Chen, Qi Xie, Charles Dezelah, Petro Deminskyi, Giuseppe Alessio Verni +1 more | 2025-07-15 |
| 12351902 | Methods and systems for delivery of vanadium compounds | Charles Dezelah, Qi Xie, Petri Raisanen, Dieter Pierreux, Bert Jongbloed +1 more | 2025-07-08 |
| 12354877 | Vapor deposition of films comprising molybdenum | Bhushan Zope, Eric Christopher Stevens, Shankar Swaminathan, Robert Brennan Milligan | 2025-07-08 |
| 12295163 | Formation of gate stacks comprising a threshold voltage tuning layer | Fu Tang, Gejian Zhao, Eric Jen Cheng Liu | 2025-05-06 |
| 12293911 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Shankar Swaminathan | 2025-05-06 |
| 12249534 | Detection method for seized traveling lift pins in wafer processing reactor systems | Abhishek Mangoli, Harihara Krishnan Krishnamoorthy, Daniel G. Maurice, Julio Cesar Diaz, Massood Mostaghimi | 2025-03-11 |
| 12247286 | Heater assembly including cooling apparatus and method of using same | Carl Louis White, Kyle Fondurulia, Timothy J. Sullivan | 2025-03-11 |
| 12237171 | Method of forming vanadium nitride layer and structure including the vanadium nitride layer | Giuseppe Alessio Verni, Qi Xie, Henri Jussila, Charles Dezelah, Jiyeon Kim +1 more | 2025-02-25 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2025-02-25 |
| 12221357 | Methods and apparatus for stabilizing vanadium compounds | Charles Dezelah | 2025-02-11 |
| 12087586 | Method of forming chromium nitride layer and structure including the chromium nitride layer | Qi Xie, Charles Dezelah, Giuseppe Alessio Verni, Petri Raisanen | 2024-09-10 |
| 12068164 | Bottom-up metal nitride formation | — | 2024-08-20 |
| 11976361 | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus | Robert Brennan Milligan, William George Petro, Eric Wang, Fred Alokozai, Dong Li +3 more | 2024-05-07 |
| 11967488 | Method for treatment of deposition reactor | Suvi Haukka, Fred Alokozai, Dong Li, Jereld Lee Winkler, Xichong Chen | 2024-04-23 |
| 11959168 | Solid source precursor vessel | Jianqiu Huang, Ankit Kimtee, Sudhanshu Biyani, Jonathan Bakke | 2024-04-16 |
| 11946136 | Semiconductor processing device | Jereld Lee Winkler, Carl Louis White, Shankar Swaminathan, Bhushan Zope | 2024-04-02 |
| 11926895 | Structures including metal carbide material, devices including the structures, and methods of forming same | Petri Raisanen, Michael Eugene Givens | 2024-03-12 |
| 11926894 | Reactant vaporizer and related systems and methods | Mohith Verghese, Carl Louis White, Kyle Fondurulia, Herbert Terhorst | 2024-03-12 |
| 11901175 | Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer | Paul F. Ma, Bed Prasad Sharma, Shankar Swaminathan | 2024-02-13 |
| 11898242 | Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film | Bhushan Zope, Eric Christopher Stevens, Shankar Swaminathan, Roghayyeh Lotfi, Mustafa Muhammad | 2024-02-13 |
| 11885013 | Method of forming vanadium nitride layer and structure including the vanadium nitride layer | Giuseppe Alessio Verni, Qi Xie, Henri Jussila, Charles Dezelah, Jiyeon Kim +1 more | 2024-01-30 |
| 11873557 | Method of depositing vanadium metal | Charles Dezelah, Qi Xie, Giuseppe Alessio Verni, Petro Deminskyi | 2024-01-16 |