| 12237392 |
Titanium aluminum and tantalum aluminum thin films |
Suvi Haukka, Michael Eugene Givens, Eric James Shero, Petri Raisanen, Timo Asikainen +2 more |
2025-02-25 |
| 11139383 |
Titanium aluminum and tantalum aluminum thin films |
Suvi Haukka, Michael Eugene Givens, Eric James Shero, Petri Raisanen, Timo Asikainen +2 more |
2021-10-05 |
| 10636889 |
Titanium aluminum and tantalum aluminum thin films |
Suvi Haukka, Michael Eugene Givens, Eric James Shero, Petri Raisanen, Timo Asikainen +2 more |
2020-04-28 |
| 10370761 |
Pulsed valve manifold for atomic layer deposition |
Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst |
2019-08-06 |
| 10002936 |
Titanium aluminum and tantalum aluminum thin films |
Suvi Haukka, Michael Eugene Givens, Eric James Shero, Petri Raisanen, Timo Asikainen +2 more |
2018-06-19 |
| 9574268 |
Pulsed valve manifold for atomic layer deposition |
Todd Robert Dunn, Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst |
2017-02-21 |
| 9340874 |
Chamber sealing member |
Michael Halpin, Eric James Shero, Carl Louis White, Fred Alokozai, Todd Robert Dunn |
2016-05-17 |
| 9299595 |
Susceptor heater and method of heating a substrate |
Todd Robert Dunn, Fred Alokozai, Michael Halpin |
2016-03-29 |
| 9202727 |
Susceptor heater shim |
Todd Robert Dunn, Carl Louis White, Michael Halpin, Eric James Shero |
2015-12-01 |
| 9167625 |
Radiation shielding for a substrate holder |
Eric James Shero, Michael Halpin |
2015-10-20 |
| 9005539 |
Chamber sealing member |
Michael Halpin, Eric James Shero, Carl Louis White, Fred Alokozai, Todd Robert Dunn |
2015-04-14 |
| 8933375 |
Susceptor heater and method of heating a substrate |
Todd Robert Dunn, Fred Alokozai, Michael Halpin |
2015-01-13 |