Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088015 | Apparatus for adjusting a pedestal assembly for a reactor | — | 2021-08-10 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Carl Louis White, Todd Robert Dunn, Eric James Shero +3 more | 2020-06-16 |
| 10480095 | System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Paul Jacobson | 2019-11-19 |
| 10186450 | Apparatus and method for adjusting a pedestal assembly for a reactor | — | 2019-01-22 |
| 9885123 | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Paul Jacobson | 2018-02-06 |
| 9340874 | Chamber sealing member | Eric James Shero, Carl Louis White, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |
| 9299595 | Susceptor heater and method of heating a substrate | Todd Robert Dunn, Fred Alokozai, Jerry Winkler | 2016-03-29 |
| 9202727 | Susceptor heater shim | Todd Robert Dunn, Carl Louis White, Eric James Shero, Jerry Winkler | 2015-12-01 |
| 9167625 | Radiation shielding for a substrate holder | Eric James Shero, Jerry Winkler | 2015-10-20 |
| 9005539 | Chamber sealing member | Eric James Shero, Carl Louis White, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2015-04-14 |
| 8933375 | Susceptor heater and method of heating a substrate | Todd Robert Dunn, Fred Alokozai, Jerry Winkler | 2015-01-13 |
| D698904 | Vacuum flange ring | Robert Brennan Milligan | 2014-02-04 |
| 7655093 | Wafer support system | Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +5 more | 2010-02-02 |
| 7186298 | Wafer support system | Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2007-03-06 |
| 7169234 | Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder | Thomas Weeks, Lewis C. Barnett, Loren Jacobs, Eric Wood | 2007-01-30 |
| 7166165 | Barrier coating for vitreous materials | — | 2007-01-23 |
| 6980734 | Lamp filament design | — | 2005-12-27 |
| 6976586 | Delicate product packaging system | — | 2005-12-20 |
| 6929299 | Bonded structures for use in semiconductor processing environments | — | 2005-08-16 |
| 6869485 | Compact process chamber for improved process uniformity | — | 2005-03-22 |
| 6856078 | Lamp filament design | — | 2005-02-15 |
| 6781291 | Filament support for lamp | — | 2004-08-24 |
| 6692576 | Wafer support system | Mark Hawkins, Derrick W. Foster, Robert Vyne, John F. Wengert, Cornelius A. van der Jeugd +1 more | 2004-02-17 |
| 6608287 | Process chamber with rectangular temperature compensation ring | Derrick W. Foster | 2003-08-19 |
| 6572924 | Exhaust system for vapor deposition reactor and method of using the same | — | 2003-06-03 |