Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10480095 | System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2019-11-19 |
| 9885123 | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow | Michael Halpin | 2018-02-06 |
| 8088223 | System for control of gas injectors | Michael A. Todd, Keith Doran Weeks | 2012-01-03 |
| 7816236 | Selective deposition of silicon-containing films | Matthias Bauer, Chantal Arena, Ronald Thomas Bertram, JR., Pierre Tomasini, Nyles Wynn Cody +3 more | 2010-10-19 |
| 7231141 | High temperature drop-off of a substrate | Ivo Raaijmakers, Ravinder Aggarwal, Robert C. Haro | 2007-06-12 |
| 6720531 | Light scattering process chamber walls | Ivo Raaijmakers | 2004-04-13 |
| 6704496 | High temperature drop-off of a substrate | Ivo Raaijmakers, Ravinder Aggarwal, Robert C. Haro | 2004-03-09 |
| 6521503 | High temperature drop-off of a substrate | Ivo Raaijmakers, Ravinder Aggarwal, Robert C. Haro | 2003-02-18 |
| 6318957 | Method for handling of wafers with minimal contact | Paul R. Carr, James Kusbel, James S. Roundy, Ravinder Aggarwal, Ivo Raaijmakers +2 more | 2001-11-20 |
| 6158951 | Wafer carrier and method for handling of wafers with minimal contact | Paul R. Carr, James Kusbel, James S. Roundy, Ravinder Aggarwal, Ivo Raaijmakers | 2000-12-12 |