| 9644285 |
Direct liquid injection for halide vapor phase epitaxy systems and methods |
— |
2017-05-09 |
| 9481944 |
Gas injectors including a funnel- or wedge-shaped channel for chemical vapor deposition (CVD) systems and CVD systems with the same |
Chantal Arena, Ed Lindow, Christiaan J. Werkhoven |
2016-11-01 |
| 9412580 |
Methods for forming group III-nitride materials and structures formed by such methods |
Chantal Arena, Ed Lindow, Subhash Mahajan, Fanyu Meng |
2016-08-09 |
| 9175419 |
Apparatus for delivering precursor gases to an epitaxial growth substrate |
Chantal Arena, Christiaan J. Werkhoven, Ed Lindow, Dennis L. Goodwin |
2015-11-03 |
| 9076666 |
Template layers for heteroepitaxial deposition of III-nitride semiconductor materials using HVPE processes |
Chantal Arena, Ed Lindow, Subhash Mahajan, Ilsu Han |
2015-07-07 |
| 9023721 |
Methods of forming bulk III-nitride materials on metal-nitride growth template layers, and structures formed by such methods |
Chantal Arena, Ed Lindow |
2015-05-05 |
| 9012919 |
III-V semiconductor structures and methods for forming the same |
Ed Lindow, Chantal Arena, Ranjan Datta, Subhash Mahajan |
2015-04-21 |
| 8741385 |
Thermalization of gaseous precursors in CVD reactors |
Chantal Arena, Christiaan J. Werkhoven, Ed Lindow |
2014-06-03 |
| 8574968 |
Epitaxial methods and templates grown by the methods |
Chantal Arena, Christiaan J. Werkhoven, Ed Lindow, Subhash Mahajan, Ranjan Datta +2 more |
2013-11-05 |
| 8486192 |
Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methods |
— |
2013-07-16 |
| 8455370 |
Transfer of high temperature wafers |
Michael A. Tischler |
2013-06-04 |
| 8431419 |
UV absorption based monitor and control of chloride gas stream |
Chantal Arena, Christiaan J. Werkhoven, Michael A. Tischler, Vasil Vorsa, Andrew David Johnson |
2013-04-30 |
| 8388755 |
Thermalization of gaseous precursors in CVD reactors |
Chantal Arena, Christiaan J. Werkhoven, Ed Lindow |
2013-03-05 |
| 8377802 |
III-V semiconductor structures and methods for forming the same |
Ed Lindow, Chantal Arena, Ranjan Datta, Subhash Mahajan |
2013-02-19 |
| 8153536 |
Transfer of high temperature wafers |
Michael A. Tischler |
2012-04-10 |
| 7816236 |
Selective deposition of silicon-containing films |
Matthias Bauer, Chantal Arena, Pierre Tomasini, Nyles Wynn Cody, Paul Brabant +3 more |
2010-10-19 |
| 7550075 |
Removal of contaminants from a fluid |
Douglas M. Scott |
2009-06-23 |
| 6121140 |
Method of improving surface morphology and reducing resistivity of chemical vapor deposition-metal films |
Chantal Arena, Emmanuel Guidotti, Joseph T. Hillman |
2000-09-19 |
| 6090705 |
Method of eliminating edge effect in chemical vapor deposition of a metal |
Chantal Arena, Emmanuel Guidotti, Joseph T. Hillman |
2000-07-18 |