Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421319 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Mohammad Ameen | 2022-08-23 |
| 10961620 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Mohammad Ameen | 2021-03-30 |
| 8580993 | Amino vinylsilane precursors for stressed SiN films | Andrew David Johnson, Manchao Xiao | 2013-11-12 |
| 8431419 | UV absorption based monitor and control of chloride gas stream | Ronald Thomas Bertram, JR., Chantal Arena, Christiaan J. Werkhoven, Michael A. Tischler, Andrew David Johnson | 2013-04-30 |