Issued Patents All Time
Showing 1–25 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428722 | Compositions and methods using same for deposition of silicon-containing film | Jianheng Li, Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Dino Sinatore | 2025-09-30 |
| 12264258 | Compositions comprising silacycloalkanes and methods using same for deposition of silicon-containing film | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei, Ming Li | 2025-04-01 |
| 12230496 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2025-02-18 |
| 12057310 | Functionalized cyclosilazanes as precursors for high growth rate silicon-containing films | Matthew R. MacDonald | 2024-08-06 |
| 12049695 | Compositions and methods using same for deposition of silicon-containing film | Raymond Nicholas Vrtis, William Robert Entley, Robert Gordon Ridgeway, Xinjian Lei, John Francis Lehmann | 2024-07-30 |
| 12018040 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Meiliang Wang | 2024-06-25 |
| 11952465 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Meiliang Wang | 2024-04-09 |
| 11851756 | Methods for depositing silicon-containing films | Ming Li, Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway | 2023-12-26 |
| 11735413 | Precursors and flowable CVD methods for making low-k films to fill surface features | Daniel P. Spence, Richard Ho | 2023-08-22 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11713328 | Stable alkenyl or alkynyl-containing organosilicon precursor compositions | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Xinjian Lei, Madhukar Bhaskara Rao, Steven Gerard Mayorga +2 more | 2023-08-01 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Matthew R. MacDonald, Daniel P. Spence, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Meiliang Wang, Matthew R. MacDonald, Richard Ho, Suresh K. Rajaraman | 2023-02-21 |
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei | 2022-03-08 |
| 11177127 | Functionalized cyclosilazanes as precursors for high growth rate silicon-containing films | Matthew R. MacDonald | 2021-11-16 |
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Jianheng Li | 2021-10-12 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Xinjian Lei, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2021-10-05 |
| 11098069 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Meiliang Wang | 2021-08-24 |
| 11049714 | Silyl substituted organoamines as precursors for high growth rate silicon-containing films | Matthew R. MacDonald | 2021-06-29 |
| 11043374 | Silacycloalkane compounds and methods for depositing silicon containing films using same | Robert Gordon Ridgeway, Daniel P. Spence, Xinjian Lei, Raymond Nicholas Vrtis | 2021-06-22 |
| 11035039 | Compositions and methods for depositing silicon nitride films | Xinjian Lei, Moo-Sung Kim | 2021-06-15 |
| 11017998 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Xinjian Lei | 2021-05-25 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |
| 10899500 | Alkoxysilylamine compounds and applications thereof | Ronald Martin Pearlstein, Richard Ho, Daniel P. Spence, Xinjian Lei | 2021-01-26 |
| 10822458 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Meiliang Wang | 2020-11-03 |