Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735413 | Precursors and flowable CVD methods for making low-k films to fill surface features | Manchao Xiao, Richard Ho | 2023-08-22 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Manchao Xiao, Matthew R. MacDonald, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao, Jianheng Li | 2021-10-12 |
| 11043374 | Silacycloalkane compounds and methods for depositing silicon containing films using same | Manchao Xiao, Robert Gordon Ridgeway, Xinjian Lei, Raymond Nicholas Vrtis | 2021-06-22 |
| 10899500 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Ronald Martin Pearlstein, Richard Ho, Xinjian Lei | 2021-01-26 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao, Jianheng Li | 2019-09-24 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Ronald Martin Pearlstein, Richard Ho, Xinjian Lei | 2019-05-07 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10170297 | Compositions and methods using same for flowable oxide deposition | Ronald Martin Pearlstein | 2019-01-01 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Haripin Chandra, Mark Leonard O'Neill | 2018-05-22 |
| 9809711 | Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process | Manchao Xiao, Ronald Martin Pearlstein, Richard Ho, Xinjian Lei, Steven Gerard Mayorga | 2017-11-07 |
| 9796739 | AZA-polysilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei | 2017-10-24 |
| 9677178 | Alkoxyaminosilane compounds and applications thereof | Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao, Richard Ho | 2017-06-13 |
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2017-04-04 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |
| 9200167 | Alkoxyaminosilane compounds and applications thereof | Ronald Martin Pearlstein, Xinjian Lei, Manchao Xiao, Richard Ho, Mark Leonard O'Neill +1 more | 2015-12-01 |
| 9079923 | Multidentate ketoimine ligands for metal complexes | Xinjian Lei | 2015-07-14 |
| 9018387 | Complexes of imidazole ligands | John Anthony Thomas Norman, Melanie K. Perez, Xinjian Lei, Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III | 2015-04-28 |
| 8952188 | Group 4 metal precursors for metal-containing films | Sergei Vladimirovich Ivanov, Xinjian Lei, Hansong Cheng, Moo-Sung Kim | 2015-02-10 |
| 8722933 | Method for preparing metal complexes of polydentate beta-ketoiminates | Xinjian Lei | 2014-05-13 |
| 8680289 | Complexes of imidazole ligands | John Anthony Thomas Norman, Melanie K. Perez, Xinjian Lei, Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III | 2014-03-25 |
| 8642797 | Amidate precursors for depositing metal containing films | Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III, Xinjian Lei | 2014-02-04 |
| 8617305 | Metal complexes for metal-containing film deposition | Xinjian Lei | 2013-12-31 |
| 8592606 | Liquid precursor for depositing group 4 metal containing films | Xinjian Lei, John Anthony Thomas Norman | 2013-11-26 |