Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421603 | Composition for high temperature atomic layer deposition of high quality silicon oxide thin films | Xinjian Lei, Madhukar Bhaskara Rao | 2025-09-23 |
| 12297115 | High temperature atomic layer deposition of silicon-containing film | Xinjian Lei | 2025-05-13 |
| 12230496 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2025-02-18 |
| 12018040 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Manchao Xiao | 2024-06-25 |
| 11952465 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Xinjian Lei | 2024-04-09 |
| 11713328 | Stable alkenyl or alkynyl-containing organosilicon precursor compositions | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Xinjian Lei, Madhukar Bhaskara Rao, Steven Gerard Mayorga +2 more | 2023-08-01 |
| 11702743 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Xinjian Lei, Matthew R. MacDonald | 2023-07-18 |
| 11649547 | Deposition of carbon doped silicon oxide | Xinjian Lei, Haripin Chandra, Matthew R. MacDonald | 2023-05-16 |
| 11626279 | Compositions and methods for making silicon containing films | Anupama Mallikarjunan, Andrew David Johnson, Raymond Nicholas Vrtis, Bing Han, Xinjian Lei +1 more | 2023-04-11 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Xinjian Lei, Manchao Xiao, Matthew R. MacDonald, Daniel P. Spence, Suresh K. Rajaraman | 2023-02-28 |
| 11584854 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Matthew R. MacDonald, Richard Ho, Manchao Xiao, Suresh K. Rajaraman | 2023-02-21 |
| 11139162 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2021-10-05 |
| 11098069 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Xinjian Lei, Manchao Xiao | 2021-08-24 |
| 11078569 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Xinjian Lei, Matthew R. MacDonald | 2021-08-03 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill | 2021-04-27 |
| 10822458 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Xinjian Lei | 2020-11-03 |
| 10703915 | Compositions and methods for the deposition of silicon oxide films | Xinjian Lei, Matthew R. MacDonald, Richard Ho, Manchao Xiao, Suresh K. Rajaraman | 2020-07-07 |
| 10464953 | Carbon bridged aminosilane compounds for high growth rate silicon-containing films | Xinjian Lei, Manchao Xiao, Suresh K. Rajaraman | 2019-11-05 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2019-10-22 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Xinjian Lei, Anupama Mallikarjunan, Haripin Chandra, Bing Han | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |