Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205061 | Shared data induced quality control for a chemical mechanical planarization process | Cesar Clavero, Vid Gopal, Ryan W. Clarke, Esmeralda Yitamben, Hieu Pham +6 more | 2025-01-21 |
| 12163224 | Methods for depositing a conformal metal or metalloid silicon nitride film | Xinjian Lei, Moo-Sung Kim, Aaron Dangerfield, Luis Fabián Peña, Yves Chabal | 2024-12-10 |
| 11742200 | Composition and methods using same for carbon doped silicon containing films | Haripin Chandra, Xinjian Lei, Moo-Sung Kim | 2023-08-29 |
| 11626279 | Compositions and methods for making silicon containing films | Andrew David Johnson, Meiliang Wang, Raymond Nicholas Vrtis, Bing Han, Xinjian Lei +1 more | 2023-04-11 |
| 11152206 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Xinjian Lei, Moo-Sung Kim | 2021-10-19 |
| 10422034 | Silicon-based films and methods of forming the same | Xinjian Lei, Matthew R. MacDonald, Manchao Xiao | 2019-09-24 |
| 10319862 | Barrier materials for display devices | Robert Gordon Ridgeway, Andrew David Johnson, Raymond Nicholas Vrtis, Xinjian Lei, Mark Leonard O'Neill +3 more | 2019-06-11 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Meiliang Wang, Xinjian Lei, Haripin Chandra, Bing Han | 2019-05-07 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2019-05-07 |
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Haripin Chandra +1 more | 2018-09-18 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2018-06-12 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Xinjian Lei, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |
| 9879340 | Silicon-based films and methods of forming the same | Xinjian Lei, Matthew R. MacDonald, Manchao Xiao | 2018-01-30 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Haripin Chandra +1 more | 2017-04-18 |
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2017-04-04 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2016-05-10 |
| 8889235 | Dielectric barrier deposition using nitrogen containing precursor | Raymond Nicholas Vrtis, Laura M. Matz, Mark Leonard O'Neill, Andrew David Johnson, Manchao Xiao | 2014-11-18 |
| 8278222 | Selective etching and formation of xenon difluoride | Dingjun Wu, Eugene Joseph Karwacki, Jr., Andrew David Johnson | 2012-10-02 |
| 7585704 | Method of producing highly strained PECVD silicon nitride thin films at low temperature | Michael P. Belyansky, Oleg Gluschenkov, Ying Li | 2009-09-08 |