Issued Patents All Time
Showing 1–25 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428722 | Compositions and methods using same for deposition of silicon-containing film | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Dino Sinatore, Manchao Xiao | 2025-09-30 |
| 12421603 | Composition for high temperature atomic layer deposition of high quality silicon oxide thin films | Meiliang Wang, Madhukar Bhaskara Rao | 2025-09-23 |
| 12410202 | Group V and VI transition metal precursors for thin film deposition | Guocan Li, Sergei Vladimirovich Ivanov, Hongbo Li | 2025-09-09 |
| 12320001 | Compositions and methods using same for thermal deposition silicon-containing films | Chandra Haripin | 2025-06-03 |
| 12312684 | Siloxane compositions and methods for using the compositions to deposit silicon containing films | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway | 2025-05-27 |
| 12297115 | High temperature atomic layer deposition of silicon-containing film | Meiliang Wang | 2025-05-13 |
| 12264258 | Compositions comprising silacycloalkanes and methods using same for deposition of silicon-containing film | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Ming Li, Manchao Xiao | 2025-04-01 |
| 12230496 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2025-02-18 |
| 12163224 | Methods for depositing a conformal metal or metalloid silicon nitride film | Moo-Sung Kim, Anupama Mallikarjunan, Aaron Dangerfield, Luis Fabián Peña, Yves Chabal | 2024-12-10 |
| 12049695 | Compositions and methods using same for deposition of silicon-containing film | Raymond Nicholas Vrtis, William Robert Entley, Robert Gordon Ridgeway, John Francis Lehmann, Manchao Xiao | 2024-07-30 |
| 12018040 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Manchao Xiao, Meiliang Wang | 2024-06-25 |
| 11952465 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Meiliang Wang | 2024-04-09 |
| 11913112 | Processes for depositing silicon-containing films using halidosilane compounds and compositions | Jianheng Li, John Francis Lehmann, Alan Charles Cooper | 2024-02-27 |
| 11884689 | Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using same | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Jennifer Lynn Anne Achtyl, William Robert Entley | 2024-01-30 |
| 11851756 | Methods for depositing silicon-containing films | Ming Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao | 2023-12-26 |
| 11742200 | Composition and methods using same for carbon doped silicon containing films | Haripin Chandra, Anupama Mallikarjunan, Moo-Sung Kim | 2023-08-29 |
| 11732351 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Moo-Sung Kim, Jianheng Li | 2023-08-22 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11713328 | Stable alkenyl or alkynyl-containing organosilicon precursor compositions | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Madhukar Bhaskara Rao, Steven Gerard Mayorga, Neil Osterwalder +2 more | 2023-08-01 |
| 11702743 | Trisilylamine derivatives as precursors for high growth rate silicon-containing films | Matthew R. MacDonald, Meiliang Wang | 2023-07-18 |
| 11649547 | Deposition of carbon doped silicon oxide | Meiliang Wang, Haripin Chandra, Matthew R. MacDonald | 2023-05-16 |
| 11631580 | Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials | Matthew R. MacDonald, Moo-Sung Kim, Se Won Lee | 2023-04-18 |
| 11626279 | Compositions and methods for making silicon containing films | Anupama Mallikarjunan, Andrew David Johnson, Meiliang Wang, Raymond Nicholas Vrtis, Bing Han +1 more | 2023-04-11 |
| 11605535 | Boron-containing compounds, compositions, and methods for the deposition of a boron containing films | Moo-Sung Kim | 2023-03-14 |
| 11591692 | Organoamino-polysiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Daniel P. Spence, Meiliang Wang, Suresh K. Rajaraman | 2023-02-28 |