Issued Patents All Time
Showing 51–75 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468244 | Precursors and flowable CVD methods for making low-K films to fill surface features | Jianheng Li, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao | 2019-11-05 |
| 10460929 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-29 |
| 10453675 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Richard Ho, Haripin Chandra, Matthew R. MacDonald +1 more | 2019-10-22 |
| 10422034 | Silicon-based films and methods of forming the same | Anupama Mallikarjunan, Matthew R. MacDonald, Manchao Xiao | 2019-09-24 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Ronald Martin Pearlstein, Manchao Xiao, Jianheng Li | 2019-09-24 |
| 10395920 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Jianheng Li, William Robert Entley, Jennifer Lynn Anne Achtyl | 2019-08-27 |
| 10354860 | Method and precursors for manufacturing 3D devices | Jianheng Li, Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Bing Han, Madhukar Bhaskara Rao | 2019-07-16 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Ronald Martin Pearlstein, Haripin Chandra, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10319862 | Barrier materials for display devices | Robert Gordon Ridgeway, Andrew David Johnson, Anupama Mallikarjunan, Raymond Nicholas Vrtis, Mark Leonard O'Neill +3 more | 2019-06-11 |
| 10316407 | Compositions and methods using same for deposition of silicon-containing films | Moo-Sung Kim, Matthew R. MacDonald, Manchao Xiao | 2019-06-11 |
| 10294250 | Organoaminosilanes and methods for making same | Manchao Xiao, Matthew R. MacDonald, Richard Ho | 2019-05-21 |
| 10283348 | High temperature atomic layer deposition of silicon-containing films | Meiliang Wang, Anupama Mallikarjunan, Haripin Chandra, Bing Han | 2019-05-07 |
| 10283350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2019-05-07 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Ronald Martin Pearlstein, Richard Ho, Daniel P. Spence | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Anupama Mallikarjunan, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 10106890 | Compositions and methods using same for deposition of silicon-containing film | Jianheng Li, John Francis Lehmann, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, William Robert Entley | 2018-10-23 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Manchao Xiao, Haripin Chandra, Anupama Mallikarjunan +1 more | 2018-09-18 |
| 9994954 | Volatile dihydropyrazinly and dihydropyrazine metal complexes | John Anthony Thomas Norman, Sergei Vladimirovich Ivanov | 2018-06-12 |
| 9997350 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2018-06-12 |
| 9978585 | Organoaminodisilane precursors and methods for depositing films comprising same | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Mark Leonard O'Neill | 2018-05-22 |
| 9922818 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Jianheng Li, William Robert Entley, Jennifer Lynn Anne Achtyl | 2018-03-20 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Anupama Mallikarjunan, Moo-Sung Kim, Kirk Scott Cuthill, Mark Leonard O'Neill | 2018-02-27 |
| 9879340 | Silicon-based films and methods of forming the same | Anupama Mallikarjunan, Matthew R. MacDonald, Manchao Xiao | 2018-01-30 |
| 9809711 | Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process | Manchao Xiao, Ronald Martin Pearlstein, Richard Ho, Steven Gerard Mayorga, Daniel P. Spence | 2017-11-07 |