Issued Patents All Time
Showing 76–100 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796739 | AZA-polysilane precursors and methods for depositing films comprising same | Manchao Xiao, Daniel P. Spence | 2017-10-24 |
| 9758534 | Organoaminosilanes and methods for making same | Manchao Xiao, Matthew R. MacDonald, Richard Ho | 2017-09-12 |
| 9677178 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Ronald Martin Pearlstein, Manchao Xiao, Richard Ho | 2017-06-13 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Manchao Xiao, Haripin Chandra, Anupama Mallikarjunan +1 more | 2017-04-18 |
| 9613799 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2017-04-04 |
| 9598766 | Vessel with filter | Charles Michael Birtcher, Thomas Andrew Steidl, Sergei Vladimirovich Ivanov | 2017-03-21 |
| 9543517 | Method of making a multicomponent film | Moo-Sung Kim | 2017-01-10 |
| 9502234 | Methods to prepare silicon-containing films | Manchao Xiao, Bing Han, Mark Leonard O'Neill | 2016-11-22 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9435027 | Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel | Charles Michael Birtcher, Thomas Andrew Steidl | 2016-09-06 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |
| 9243324 | Methods of forming non-oxygen containing silicon-based films | Heather Regina Bowen, Jianheng Li, Mark Leonard O'Neill, Manchao Xiao, Andrew David Johnson | 2016-01-26 |
| 9233990 | Organoaminosilanes and methods for making same | Manchao Xiao, Matthew R. MacDonald, Richard Ho | 2016-01-12 |
| 9214630 | Method of making a multicomponent film | Manchao Xiao, Iain Buchanan, Moo-Sung Kim, Sergei Vladimirovich Ivanov, Cheol Seong Hwang +1 more | 2015-12-15 |
| 9200167 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Ronald Martin Pearlstein, Manchao Xiao, Richard Ho, Mark Leonard O'Neill +1 more | 2015-12-01 |
| 9079923 | Multidentate ketoimine ligands for metal complexes | Daniel P. Spence | 2015-07-14 |
| 9018387 | Complexes of imidazole ligands | John Anthony Thomas Norman, Melanie K. Perez, Daniel P. Spence, Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III | 2015-04-28 |
| 9005719 | Organoaminosilane precursors and methods for making and using same | Manchao Xiao, Bing Han, Mark Leonard O'Neill, Ronald Martin Pearlstein, Richard Ho +2 more | 2015-04-14 |
| 8993072 | Halogenated organoaminosilane precursors and methods for depositing films comprising same | Manchao Xiao, Mark Leonard O'Neill, Bing Han, Ronald Martin Pearlstein, Haripin Chandra +2 more | 2015-03-31 |
| 8962875 | Metal-enolate precursors for depositing metal-containing films | John Anthony Thomas Norman | 2015-02-24 |
| 8952188 | Group 4 metal precursors for metal-containing films | Sergei Vladimirovich Ivanov, Hansong Cheng, Daniel P. Spence, Moo-Sung Kim | 2015-02-10 |
| 8940648 | Process for producing silicon and oxide films from organoaminosilane precursors | Manchao Xiao, Heather Regina Bowen, Mark Leonard O'Neill | 2015-01-27 |
| 8912353 | Organoaminosilane precursors and methods for depositing films comprising same | Manchao Xiao, Mark Leonard O'Neill, Heather Regina Bowen, Hansong Cheng | 2014-12-16 |
| 8906455 | Low temperature deposition of silicon-containing films | Liu Yang, Bing Han, Manchao Xiao, Eugene Joseph Karwacki, Jr., Hansong Cheng | 2014-12-09 |