Issued Patents All Time
Showing 101–125 of 132 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8828505 | Plasma enhanced cyclic chemical vapor deposition of silicon-containing films | Hareesh Thridandam, Manchao Xiao, Thomas Richard Gaffney, Eugene Joseph Karwacki, Jr. | 2014-09-09 |
| 8771807 | Organoaminosilane precursors and methods for making and using same | Manchao Xiao, Bing Han, Mark Leonard O'Neill, Ronald Martin Pearlstein, Richard Ho +2 more | 2014-07-08 |
| 8722933 | Method for preparing metal complexes of polydentate beta-ketoiminates | Daniel P. Spence | 2014-05-13 |
| 8708320 | Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel | Thomas Andrew Steidl, Charles Michael Birtcher | 2014-04-29 |
| 8691710 | Group IV metal complexes for metal-containing film deposition | Wade Hampton Bailey, III, Sergei Vladimirovich Ivanov, Moo-Sung Kim | 2014-04-08 |
| 8680289 | Complexes of imidazole ligands | John Anthony Thomas Norman, Melanie K. Perez, Daniel P. Spence, Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III | 2014-03-25 |
| 8642797 | Amidate precursors for depositing metal containing films | Sergei Vladimirovich Ivanov, Wade Hampton Bailey, III, Daniel P. Spence | 2014-02-04 |
| 8617305 | Metal complexes for metal-containing film deposition | Daniel P. Spence | 2013-12-31 |
| 8592606 | Liquid precursor for depositing group 4 metal containing films | John Anthony Thomas Norman, Daniel P. Spence | 2013-11-26 |
| 8592058 | Methods of forming strontium titanate films | Laura M. Matz, Xiangxin Rui, Sunil Shanker, Moo-Sung Kim, Iain Buchanan | 2013-11-26 |
| 8563353 | Method of making a multicomponent film | Manchao Xiao, Liu Yang, Iain Buchanan | 2013-10-22 |
| 8530361 | Process for producing silicon and oxide films from organoaminosilane precursors | Manchao Xiao, Heather Regina Bowen, Mark Leonard O'Neill | 2013-09-10 |
| 8507040 | Binary and ternary metal chalcogenide materials and method of making and using same | Manchao Xiao, Liu Yang | 2013-08-13 |
| 8507704 | Liquid composition containing aminoether for deposition of metal-containing films | Sergei Vladimirovich Ivanov, Daniel P. Spence, John Anthony Thomas Norman, Laura M. Matz | 2013-08-13 |
| 8471049 | Precursors for depositing group 4 metal-containing films | Daniel P. Spence, Moo-Sung Kim, Iain Buchanan, Laura M. Matz, Sergei Vladimirovich Ivanov | 2013-06-25 |
| 8313807 | High coordination sphere group 2 metal β-diketiminate precursors | John Anthony Thomas Norman | 2012-11-20 |
| 8298628 | Low temperature deposition of silicon-containing films | Liu Yang, Bing Han, Manchao Xiao, Eugene Joseph Karwacki, Jr., Kazuhide Hasebe +3 more | 2012-10-30 |
| 8247617 | Group 2 metal precursors for depositing multi-component metal oxide films | Liam J. Quinn, Daniel P. Spence | 2012-08-21 |
| 8202808 | Methods of forming strontium titanate films | Laura M. Matz, Xiangxin Rui, Sunil Shanker, Moo-Sung Kim, Iain Buchanan | 2012-06-19 |
| 8193027 | Method of making a multicomponent film | Manchao Xiao, Liu Yang, Iain Buchanan | 2012-06-05 |
| 8092870 | Preparation of metal oxide thin film via cyclic CVD or ALD | Moo-Sung Kim, Daniel P. Spence, Sang Hyun YANG | 2012-01-10 |
| 7947814 | Metal complexes of polydentate beta-ketoiminates | Michael Ulman, Liam J. Quinn, Hansong Cheng | 2011-05-24 |
| 7919409 | Materials for adhesion enhancement of copper film on diffusion barriers | Hansong Cheng, Daniel P. Spence, John Anthony Thomas Norman, David A. Roberts, Bo Han +2 more | 2011-04-05 |
| 7875312 | Process for producing silicon oxide films for organoaminosilane precursors | Hareesh Thridandam, Manchao Xiao, Thomas Richard Gaffney | 2011-01-25 |
| 7754906 | Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides | John Anthony Thomas Norman | 2010-07-13 |