Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7919409 | Materials for adhesion enhancement of copper film on diffusion barriers | Hansong Cheng, Xinjian Lei, Daniel P. Spence, John Anthony Thomas Norman, Bo Han +2 more | 2011-04-05 |
| 7662959 | Quaternary trifluoromethylcyclohexane derivatives for liquid crystals | Gauri Sankar Lal, Michael Ulman, Wade Hampton Bailey, III, William Franklin Burgoyne | 2010-02-16 |
| 7119032 | Method to protect internal components of semiconductor processing equipment using layered superlattice materials | Bing Ji, Stephen Andrew Motika, Dingjun Wu, Eugene Joseph Karwacki, Jr. | 2006-10-10 |
| 7078358 | Low VOC cleanroom cleaning wipe | John Anthony Marsella, Robert Edward Stevens | 2006-07-18 |
| 6913029 | Multiple contents container assembly for ultrapure solvent purging | Robert Sam Zorich, George Oleg Voloshin | 2005-07-05 |
| 6869876 | Process for atomic layer deposition of metal films | John Anthony Thomas Norman, Melanie Boze | 2005-03-22 |
| 6840252 | Multiple contents container assembly for ultrapure solvent purging | Robert Sam Zorich, George Oleg Voloshin | 2005-01-11 |
| 6837251 | Multiple contents container assembly for ultrapure solvent purging | Robert Sam Zorich, George Oleg Voloshin | 2005-01-04 |
| 6818783 | Volatile precursors for deposition of metals and metal-containing films | John Anthony Thomas Norman, Morteza Farnia, Melanie Boze | 2004-11-16 |
| 6770254 | Purification of group IVb metal halides | Heather Regina Bowen | 2004-08-03 |
| 6534666 | Use of water and acidic water to purify liquid MOCVD precursors | Robert Sam Zorich, James Richard Thurmond | 2003-03-18 |
| 6526824 | High purity chemical container with external level sensor and liquid sump | Geoffrey L. Chase, John Eric Baker, Lee Senecal, Robert Sam Zorich | 2003-03-04 |
| 6503561 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, John Anthony Thomas Norman, Arthur Kenneth Hochberg | 2003-01-07 |
| 6500499 | Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors | Yoshihide Senzaki, Arthur Kenneth Hochberg, John Anthony Thomas Norman, Glenn B. Alers, Robert McLemore Fleming | 2002-12-31 |
| 6238734 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, John Anthony Thomas Norman | 2001-05-29 |
| 6096913 | Production of metal-ligand complexes | John Anthony Thomas Norman, Yoshihide Senzaki | 2000-08-01 |
| 5976991 | Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane | Ravi Laxman, Arthur Kenneth Hochberg | 1999-11-02 |
| 5874368 | Silicon nitride from bis(tertiarybutylamino)silane | Ravi Laxman, Arthur Kenneth Hochberg, Herman Gene Hockenhull, Felicia Diane Kaminsky | 1999-02-23 |
| RE35614 | Process for improved quality of CVD copper films | John Anthony Thomas Norman, Arthur Kenneth Hochberg | 1997-09-23 |
| 5626775 | Plasma etch with trifluoroacetic acid and derivatives | Raymond Nicholas Vrtis, Arthur Kenneth Hochberg, Robert G. Bryant, John Giles Langan | 1997-05-06 |
| 5492736 | Fluorine doped silicon oxide process | Ravi Laxman, Arthur Kenneth Hochberg, Raymond Nicholas Vrtis | 1996-02-20 |
| 5433975 | Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen | Diwakar Garg, Andre Lagendijk, Arthur Kenneth Hochberg, Stephen M. Fine | 1995-07-18 |
| 5322712 | Process for improved quality of CVD copper films | John Anthony Thomas Norman, Arthur Kenneth Hochberg | 1994-06-21 |
| 5298075 | Furnace tube cleaning process | Andre Lagendijk, Arthur Kenneth Hochberg | 1994-03-29 |
| 5288662 | Low ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaning | Andre Lagendijk, Arthur Kenneth Hochberg | 1994-02-22 |