Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640386 | Precursors for CVD silicon carbo-nitride films | Manchao Xiao | 2017-05-02 |
| 8932675 | Methods for depositing silicon carbo-nitride film | Manchao Xiao | 2015-01-13 |
| 8383849 | Precursors for CVD silicon carbo-nitride films | Manchao Xiao | 2013-02-26 |
| 7932413 | Precursors for CVD silicon carbo-nitride films | Manchao Xiao | 2011-04-26 |
| 7875556 | Precursors for CVD silicon carbo-nitride and silicon nitride films | Manchao Xiao | 2011-01-25 |
| 7582574 | Diethylsilane as a silicon source in the deposition of metal silicate films | Robert D. Clark, Hareesh Thridandam, Kirk Scott Cuthill | 2009-09-01 |
| 7288145 | Precursors for depositing silicon containing films | Manchao Xiao, Kirk Scott Cuthill | 2007-10-30 |
| 7261118 | Method and vessel for the delivery of precursor materials | Charles Michael Birtcher, Richard J. Dunning, Robert D. Clark, Thomas Andrew Steidl | 2007-08-28 |
| 7122222 | Precursors for depositing silicon containing films and processes thereof | Manchao Xiao, Kirk Scott Cuthill | 2006-10-17 |
| 7033560 | Single source mixtures of metal siloxides | Robert D. Clark | 2006-04-25 |
| 6844271 | Process of CVD of Hf and Zr containing oxynitride films | John D. Loftin, Robert D. Clark | 2005-01-18 |
| 6616972 | Synthesis of metal oxide and oxynitride | Yoshihide Senzaki, Kirk Scott Cuthill | 2003-09-09 |
| 6537613 | Process for metal metalloid oxides and nitrides with compositional gradients | Yoshihide Senzaki, John Anthony Thomas Norman | 2003-03-25 |
| 6503561 | Liquid precursor mixtures for deposition of multicomponent metal containing materials | Yoshihide Senzaki, David A. Roberts, John Anthony Thomas Norman | 2003-01-07 |
| 6500499 | Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors | Yoshihide Senzaki, David A. Roberts, John Anthony Thomas Norman, Glenn B. Alers, Robert McLemore Fleming | 2002-12-31 |
| 6319567 | Synthesis of tantalum nitride | Yoshihide Senzaki, John Anthony Thomas Norman | 2001-11-20 |
| 5976991 | Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane | Ravi Laxman, David A. Roberts | 1999-11-02 |
| 5874368 | Silicon nitride from bis(tertiarybutylamino)silane | Ravi Laxman, David A. Roberts, Herman Gene Hockenhull, Felicia Diane Kaminsky | 1999-02-23 |
| 5744196 | Low temperature deposition of silicon dioxide using organosilanes | Ravi Laxman | 1998-04-28 |
| RE35614 | Process for improved quality of CVD copper films | John Anthony Thomas Norman, David A. Roberts | 1997-09-23 |
| 5626775 | Plasma etch with trifluoroacetic acid and derivatives | David A. Roberts, Raymond Nicholas Vrtis, Robert G. Bryant, John Giles Langan | 1997-05-06 |
| 5492736 | Fluorine doped silicon oxide process | Ravi Laxman, David A. Roberts, Raymond Nicholas Vrtis | 1996-02-20 |
| 5433975 | Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen | David A. Roberts, Diwakar Garg, Andre Lagendijk, Stephen M. Fine | 1995-07-18 |
| 5322712 | Process for improved quality of CVD copper films | John Anthony Thomas Norman, David A. Roberts | 1994-06-21 |
| 5298075 | Furnace tube cleaning process | Andre Lagendijk, David A. Roberts | 1994-03-29 |