Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5599425 | Predecomposition of organic chlorides for silicon processing | Damon K. DeBusk | 1997-02-04 |
| 5433975 | Deposition of tungsten films from mixtures of tungsten hexafluoride organohydrosilanes and hydrogen | David A. Roberts, Diwakar Garg, Arthur Kenneth Hochberg, Stephen M. Fine | 1995-07-18 |
| 5298075 | Furnace tube cleaning process | Arthur Kenneth Hochberg, David A. Roberts | 1994-03-29 |
| 5288662 | Low ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaning | Arthur Kenneth Hochberg, David A. Roberts | 1994-02-22 |
| 5028566 | Method of forming silicon dioxide glass films | — | 1991-07-02 |
| 4851255 | Ion implant using tetrafluoroborate | Shantia Riahi | 1989-07-25 |
| 4760263 | Ion implant using tetrafluoroborate | Shantia Riahi | 1988-07-26 |
| 4298037 | Method of shipping and using semiconductor liquid source materials | John C. Schumacher | 1981-11-03 |