Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5288662 | Low ozone depleting organic chlorides for use during silicon oxidation and furnace tube cleaning | Andre Lagendijk, David A. Roberts | 1994-02-22 |
| 5204141 | Deposition of silicon dioxide films at temperatures as low as 100 degree C. by LPCVD using organodisilane sources | David A. Roberts | 1993-04-20 |
| 5013690 | Method for deposition of silicon films from azidosilane sources | David L. O'Meara, David A. Roberts | 1991-05-07 |
| 4992299 | Deposition of silicon nitride films from azidosilane sources | David L. O'Meara, David A. Roberts | 1991-02-12 |
| 4992306 | Deposition of silicon dioxide and silicon oxynitride films using azidosilane sources | David L. O'Meara, David A. Roberts | 1991-02-12 |
| 4981724 | Deposition of silicon oxide films using alkylsilane liquid sources | David L. O'Meara | 1991-01-01 |
| 4220116 | Reactant gas flow structure for a low pressure chemical vapor deposition system | — | 1980-09-02 |