Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald, Manchao Xiao +2 more | 2018-12-04 |
| 9905415 | Methods for depositing silicon nitride films | Haripin Chandra, Anupama Mallikarjunan, Xinjian Lei, Moo-Sung Kim, Mark Leonard O'Neill | 2018-02-27 |
| 8703624 | Dielectric films comprising silicon and methods for making same | Liu Yang, Manchao Xiao, Bing Han, Mark Leonard O'Neill | 2014-04-22 |
| 8703625 | Methods to prepare silicon-containing films | Liu Yang, Manchao Xiao, Bing Han, Mark Leonard O'Neill | 2014-04-22 |
| 8460753 | Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes | Manchao Xiao, Liu Yang, Heather Regina Bowen, Bing Han, Mark Leonard O'Neill | 2013-06-11 |
| 7582574 | Diethylsilane as a silicon source in the deposition of metal silicate films | Robert D. Clark, Hareesh Thridandam, Arthur Kenneth Hochberg | 2009-09-01 |
| 7288145 | Precursors for depositing silicon containing films | Manchao Xiao, Arthur Kenneth Hochberg | 2007-10-30 |
| 7122222 | Precursors for depositing silicon containing films and processes thereof | Manchao Xiao, Arthur Kenneth Hochberg | 2006-10-17 |
| 7064224 | Organometallic complexes and their use as precursors to deposit metal films | Xinjian Lei, Manchao Xiao, Hareesh Thridandam | 2006-06-20 |
| 6616972 | Synthesis of metal oxide and oxynitride | Yoshihide Senzaki, Arthur Kenneth Hochberg | 2003-09-09 |