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Selective capping of copper |
Nerissa Draeger, Michael Carolus |
2012-10-02 |
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Nanoparticle cap layer |
Robert H. Havemann |
2011-10-18 |
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Protection of Cu damascene interconnects by formation of a self-aligned buffer layer |
Bart J. van Schravendijk, Thomas W. Mountsier, Mahesh K. Sanganeria, Roey Shaviv |
2011-10-04 |
| 7994640 |
Nanoparticle cap layer |
Robert H. Havemann |
2011-08-09 |
| 7396759 |
Protection of Cu damascene interconnects by formation of a self-aligned buffer layer |
Bart J. van Schravendijk, Thomas W. Mountsier, Mahesh K. Sanganeria, Roey Shaviv |
2008-07-08 |
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Method for processing silicon workpieces using hybrid optical thermometer system |
Robert Chichester, Don X Sun, Gordon Albert Thomas |
2004-12-14 |
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Damascene capacitors for integrated circuits |
Tseng-Chung Lee, Helen L. Maynard, Daniel J. Vitkavage |
2004-06-15 |
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Process for fabricating an integrated circuit device having capacitors with a multilevel metallization |
Philip W. Diodato, Ruichen Liu |
2003-05-06 |
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Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors |
Yoshihide Senzaki, Arthur Kenneth Hochberg, David A. Roberts, John Anthony Thomas Norman, Robert McLemore Fleming |
2002-12-31 |
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Semiconductor device having a metal barrier layer for a dielectric material having a high dielectric constant and a method of manufacture thereof |
Sailesh Mansinh Merchant, Pradip K. Roy |
2002-06-11 |
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Magnetostrictive surface acoustic wave devices having optimized transducers |
Kenneth Alexander Ellis, Timothy J. Klemmer, Robert Bruce van Dover |
2001-11-20 |
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Integrated circuit device having dual damascene capacitor |
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2001-11-20 |
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Method of forming a capacitor having a tungsten bottom electrode in a semiconductor wafer |
— |
2001-10-16 |
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Method for making field effect devices and capacitors with thin film dielectrics and resulting devices |
— |
2001-09-04 |
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Damascene capacitors for integrated circuits |
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2001-08-07 |
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Method for making an integrated circuit capacitor including tantalum pentoxide |
Pradip K. Roy |
2001-07-24 |
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Magnetostrictive surface acoustic wave device and microelectronic circuit including same |
Robert Bruce van Dover |
2000-04-04 |
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Detecting defects in integrated circuits |
Kathleen S. Krisch, Bonnie E. Weir |
2000-03-28 |
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Method for making field effect devices and capacitors with improved thin film dielectrics and resulting devices |
— |
1999-12-14 |
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Apparatus for processing silicon devices with improved temperature control |
Robert McLemore Fleming, Barry Levine, Gordon Albert Thomas |
1999-12-14 |
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Detecting breakdown in dielectric layers |
Kathleen S. Krisch, Bonnie E. Weir |
1998-09-08 |
