Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030777 | Protection of Cu damascene interconnects by formation of a self-aligned buffer layer | Bart J. van Schravendijk, Thomas W. Mountsier, Glenn B. Alers, Roey Shaviv | 2011-10-04 |
| 7705431 | Method of improving adhesion between two dielectric films | Bart J. van Schravendijk | 2010-04-27 |
| 7622380 | Method of improving adhesion between two dielectric films | Bart J. van Schravendijk | 2009-11-24 |
| 7396759 | Protection of Cu damascene interconnects by formation of a self-aligned buffer layer | Bart J. van Schravendijk, Thomas W. Mountsier, Glenn B. Alers, Roey Shaviv | 2008-07-08 |
| 6972252 | Method of improving adhesion between two dielectric films | Bart J. van Schravendijk | 2005-12-06 |
| 6403501 | Method of controlling FSG deposition rate in an HDP reactor | Jonathan Hander, Julian J. Hsieh | 2002-06-11 |
| 6118100 | Susceptor hold-down mechanism | Robert D. Mailho, Dean M. Dumitrescu, Joseph H. MacLeish | 2000-09-12 |
| 6113984 | Gas injection system for CVD reactors | Joseph H. MacLeish, Robert D. Mailho, Enrique Suarez del Solar | 2000-09-05 |
| 5968279 | Method of cleaning wafer substrates | Joseph H. MacLeish | 1999-10-19 |
| 5895261 | Process for making integrated circuit structure comprising local area interconnects formed over semiconductor substrate by selective deposition on seed layer in patterned trench | Richard Schinella | 1999-04-20 |
| 5670425 | Process for making integrated circuit structure comprising local area interconnects formed over semiconductor substrate by selective deposition on seed layer in patterned trench | Richard Schinella | 1997-09-23 |
| 5653808 | Gas injection system for CVD reactors | Joseph H. MacLeish, Robert D. Mailho | 1997-08-05 |
| 5439850 | Method for forming a layer of uniform thickness on a semiconductor wafer during rapid thermal processing | Mehmet Ozturk | 1995-08-08 |
| 5336903 | Selective deposition of doped silicon-germanium alloy on semiconductor substrate, and resulting structures | Mehmet Ozturk, Douglas T. Grider, Stanton Petree Ashburn, Jimmie J. Wortman | 1994-08-09 |
| 5242847 | Selective deposition of doped silion-germanium alloy on semiconductor substrate | Mehmet Ozturk, Douglas T. Grider, Stanton Petree Ashburn | 1993-09-07 |