Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902622 | Systems and methods for epitaxially depositing films on a semiconductor substrate | Kristian E. Johnsgard, David Sallows, Daniel L. Messineo, Mark Johnsgard | 2005-06-07 |
| 6436796 | Systems and methods for epitaxial processing of a semiconductor substrate | Mark J. O'Hara, Glenn A. Pfefferkorn, Gary Evans, Kristian E. Johnsgard | 2002-08-20 |
| 6118100 | Susceptor hold-down mechanism | Dean M. Dumitrescu, Joseph H. MacLeish, Mahesh K. Sanganeria | 2000-09-12 |
| 6113984 | Gas injection system for CVD reactors | Joseph H. MacLeish, Mahesh K. Sanganeria, Enrique Suarez del Solar | 2000-09-05 |
| 6031211 | Zone heating system with feedback control | Douglas S. Schatz | 2000-02-29 |
| 5891251 | CVD reactor having heated process chamber within isolation chamber | Joseph H. MacLeish | 1999-04-06 |
| 5653808 | Gas injection system for CVD reactors | Joseph H. MacLeish, Mahesh K. Sanganeria | 1997-08-05 |