Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6118100 | Susceptor hold-down mechanism | Robert D. Mailho, Dean M. Dumitrescu, Mahesh K. Sanganeria | 2000-09-12 |
| 6113984 | Gas injection system for CVD reactors | Robert D. Mailho, Mahesh K. Sanganeria, Enrique Suarez del Solar | 2000-09-05 |
| 5968279 | Method of cleaning wafer substrates | Mahesh K. Sanganeria | 1999-10-19 |
| 5891251 | CVD reactor having heated process chamber within isolation chamber | Robert D. Mailho | 1999-04-06 |
| 5653808 | Gas injection system for CVD reactors | Robert D. Mailho, Mahesh K. Sanganeria | 1997-08-05 |