Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8241991 | Method for forming interconnect structure having airgap | Nobuyoshi Kobayashi, Akira Shimizu, Kiyohiro Matsushita, Atsuki Fukazawa | 2012-08-14 |
| 8003549 | Methods of forming moisture barrier for low K film integration with anti-reflective layers | Ming Li, Bart J. van Schravendijk, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin | 2011-08-23 |
| 7642202 | Methods of forming moisture barrier for low k film integration with anti-reflective layers | Ming Li, Bart J. van Schravendijk, Tom Mountsier, Chiu Chi, Kevin J. Ilcisin | 2010-01-05 |
| 6403501 | Method of controlling FSG deposition rate in an HDP reactor | Jonathan Hander, Mahesh K. Sanganeria | 2002-06-11 |