Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478414 | Method for hydrophobization of surface of silicon-containing film by ALD | Akiko Kobayashi, Akinori Nakano, Dai Ishikawa | 2016-10-25 |
| 9190263 | Method for forming SiOCH film using organoaminosilane annealing | Dai Ishikawa, Akinori Nakano, Shintaro Ueda, Hirofumi Arai | 2015-11-17 |
| 9136108 | Method for restoring porous surface of dielectric layer by UV light-assisted ALD | Hirofumi Arai | 2015-09-15 |
| 9029272 | Method for treating SiOCH film with hydrogen plasma | Akinori Nakano, Shintaro Ueda, Dai Ishikawa | 2015-05-12 |
| 8785215 | Method for repairing damage of dielectric film by cyclic processes | Akiko Kobayashi, Yosuke Kimura, Dai Ishikawa | 2014-07-22 |
| 8664627 | Method for supplying gas with flow rate gradient over substrate | Dai Ishikawa | 2014-03-04 |
| 8241991 | Method for forming interconnect structure having airgap | Julian J. Hsieh, Nobuyoshi Kobayashi, Akira Shimizu, Atsuki Fukazawa | 2012-08-14 |
| 7807566 | Method for forming dielectric SiOCH film having chemical stability | Naoto Tsuji, Manabu Kato, Noboru Takamure | 2010-10-05 |
| 7789965 | Method of cleaning UV irradiation chamber | Hideaki Fukuda, Kenichi Kagami | 2010-09-07 |
| 7763869 | UV light irradiating apparatus with liquid filter | Kenichi Kagami | 2010-07-27 |
| 7718544 | Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient | Naoto Tsuji, Satoshi Takahashi, Nathan Kameling | 2010-05-18 |
| 7501292 | Method for managing UV irradiation for curing semiconductor substrate | Kenichi Kagami | 2009-03-10 |
| 7354852 | Method of forming interconnection in semiconductor device | Naoki Ohara, Nathan R. C. Kemeling | 2008-04-08 |
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Naoto Tsuji, Yukihiro Mori, Satoshi Takahashi, Atsuki Fukazawa, Michael A. Todd | 2004-11-16 |